An active head slider using a piezoelectric cantilever for in situ flying-height control

Suzuki, Kenji; Maeda, Ryutaro; Chu, Jiaru; Kato, Takahisa; Kurita, Masayuki

doi:10.1109/tmag.2003.808934

Cited by 27 publications

(15 citation statements)

References 6 publications

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“…5 is in larger size, which does not exhibit clear hysteresis effects until driven to 100 lm. With this size, the bandwidth of the considered piezo-actuator is lower (around 100 Hz) than that (above 10 kHz) of the much smaller piezoelectric micro-actuators designed and used for dual-stage control in hard disk drives (Mori et al 1991;Li and Horowitz 2002;Li et al 2003;Huang et al 2006;Oboe et al 1999;Tsai and Yen 1999;Tokuyama et al 2001;Lou et al 2002;Gao and Swei 2000;Liu et al 2002;Suzuki et al 2003;Tagawa et al 2003). It is the main reason that the experimental sinusoidal commands adopted herein are primarily around 1 and 10 Hz and up to 100 lm positioning range to exhibit hysteresis.…”

Section: Experimental Validationmentioning

confidence: 99%

“…For hard disk drives, the piezo-electric actuators have been designed and used for (a) precision positioning for track-following control (Mori et al 1991;Li and Horowitz 2002;Li et al 2003;Huang et al 2006;Oboe et al 1999;Tsai and Yen 1999;Tokuyama et al 2001;Lou et al 2002) or (b) flying height control of the magnetic reading head (Gao and Swei 2000;Liu et al 2002;Suzuki et al 2003;Tagawa et al 2003). For afore-objective (a), the piezoactuator is usually part of a dual-stage actuator system, which consists of a ''fine'' microactuator (MA) realized by piezo-structures and a ''coarse'' voice coil motor (VCM).…”

Section: Introductionmentioning

confidence: 99%

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Robust control design for precision positioning of a generic piezoelectric system with consideration of microscopic hysteresis effects

et al. 2011

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This study performs precision positioning of a generic piezoelectric structure against hysteresis effects by finite elements, microscopic hysteresis cancellation and robust H ? compensation. The designed control algorithm is expected to be effective in enhancing servo performance of hard disk drives. The precision positioning is accomplished by adding a polarization term into the linear constitutive equations of piezoelectric materials. This polarization term is then described by the well-known Preisach model. Applying basic principles of finite elements and Hamilton's thoery, the macroscopic governing equations of an arbitrary piezoelectric system in finite elements are obtained. Based on the macro-model, a controller consisting of two parts is designed to perform the precision positioning of a generic piezo-structure. The first part is responsible for direct hysteresis cancellation at the microscopic level, while the second one is a robust H ? controller to overcome inevitable cancellation errors. In this way, the control effort is then more effective than the conventional PI and double-lead controller without microscopic hysteresis cancellation. A simple piezoelectric structure of a bender-bimorph cantilever beam is considered for designs and experimental validation. Based on experimental results, the proposed control design is found effective to suppress hysteresis effects as opposed to conventional controllers.

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Section: Experimental Validationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Robust control design for precision positioning of a generic piezoelectric system with consideration of microscopic hysteresis effects

et al. 2011

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“…PZT thin-film actuators have wide applications, such as atomic force microscopes (AFM) [57,58], ultrasonic micromotors [59][60][61][62], one-or two-dimensional scanners [63][64][65], microswitches [66], resonators [67,68], and dual-stage actuators/sliders for next-generation computer hard disk drives [1,18,[69][70]. When PZT thin films are incorporated in a mesoor micro-actuator, there are many design challenges to overcome.…”

Section: Design Considerations For Pzt Thin-film Actuators: Measuremementioning

confidence: 99%

“…Advantages of PZT-based devices include high frequency bandwidth, fast response, and high sensitivity. Miniaturization of PZT-based devices will not only perfect many existing products, but also open vast new applications in various areas, such as active read/write heads for disk drives, tiny biomedical diagnostic tools, minute hearing implants, and miniaturized surgical tools that are less invasive [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

PZT Thin-Film Meso- and Micro Devices

Shen

Cao

et al. 2006

Ferroelectrics

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“…Another approach is to utilize piezoelectrically actuated unimorph cantilever sliders. Several papers, such as Kurita et al (2002), Kurita and Suzuki (2004), Tagawa et al (2003), Suzuki et al (2003), and Su et al (2005), have presented active sliders made of silicon with piezoelectric unimorph cantilevers. Based on this concept Bogy (2005, 2006) developed an observer-based nonlinear compensator for dynamic control of the FH.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

et al. 2006

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A gap flying height (FH) of less than 5 nm between the read/write element and the surface of the disk is required for ultrahigh density recording. A stable and constant FH must also be sustained in the presence of altitude and temperature changes and manufacturing tolerance. A FH adjustment or controlled slider that is capable of adjusting its gap FH has been proposed previously. In this paper we demonstrate an inexpensive and low-temperature approach for integrating piezoelectric materials in the fabrication of current small form-factor Al 2 O 3 -TiC sliders. A bulk PZT sheet is bonded onto the back of row-bars and the sliders are separated by a standard dicing process. It requires no deep reactive-ion etching (DRIE) or high temperature processes and is suitable for mass production. A conventional design and a new special air bearing surface (ABS) design have been fabricated and tested by an optical profiler and a FH tester. A nonflying actuation stroke of 0.6-0.8 nm/V has been observed. The FH measurements showed that the ABS plays a key role in increasing the actuation efficiency, which also agrees well with the numerical analysis.

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An active head slider using a piezoelectric cantilever for in situ flying-height control

Cited by 27 publications

References 6 publications

Robust control design for precision positioning of a generic piezoelectric system with consideration of microscopic hysteresis effects

Robust control design for precision positioning of a generic piezoelectric system with consideration of microscopic hysteresis effects

PZT Thin-Film Meso- and Micro Devices

Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

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