An advanced nonlinear model of a low-g MEMS accelerometer for a computer pen

Žumer, Jurij; Reynaerts, Dominiek; Boltežar, Miha

doi:10.1016/j.measurement.2011.10.027

Cited by 8 publications

(2 citation statements)

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“…It is true that the drift resulting from measurement errors, installation deviation and environmental parameters can be minimized or overcome by the specific compensation method of post-calibration [6][7][8][9][10][11][12]. Nevertheless, the drift that occurs during the power-on process is not easy to eliminate by external compensation or processing algorithms, due to its complexity, and it severely compromises the shortterm stability and sharply undercuts the performance of microaccelerometers in industrial automation [13][14][15][16]. Current studies into the causes of such drift mainly focus on thermal effects and residual stress.…”

Section: Introductionmentioning

confidence: 99%

Investigation of drift phenomena in closed-loop capacitive micro accelerometers

Chen¹,

Li²,

Zhan³

et al. 2020

J. Micromech. Microeng.

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The drift phenomena of closed-loop capacitive silicon-based micro accelerometers have been hindering their application in the area of precise and rapid industrial positioning, which especially requires a good dynamic performance. Using both theoretical methods and experiments, this paper will systematically investigate the underlying mechanisms of such phenomena. The possible causes of drift, including thermal effects, dynamic response, capacitor charging and dielectric charging, as described in current literature, were evaluated by specific tests. As a result, the first three factors were ruled out as the cause of drift, by both theoretical derivation and experimental observation, and only dielectric charging was identified as the most plausible contributor to the drift. The movement of charges in SiOx on electrodes and glass substrates forms an additional electrostatic field that disturbs the system balance and results in the variation of accelerometer output. The materials analysis and shielding tests carried out demonstrated that the drift phenomena of more than 60% of the tested accelerometers can be explained by the charging effect of dielectric materials, while the remaining sensors require further tests and more complicated models to determine the causes of this drift. The conclusions presented in this paper provide meaningful guidance for improving accelerometer performance in order to meet the demands of high accuracy industrial applications.

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Section: Introductionmentioning

confidence: 99%

Investigation of drift phenomena in closed-loop capacitive micro accelerometers

Chen¹,

Li²,

Zhan³

et al. 2020

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Several studies have focused on the design of a pen or device that can identify characters input via a digital interface. Although these designs are not directly related to solving conventional handwriting issues, their concepts and technologies, including algorithms, data acquisition schemes, and force sensors, can be applied to the investigation of handwriting based on biomechanical perspectives [16][17][18][19][20][21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%