2010
DOI: 10.1063/1.3430568
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An all optically driven integrated deformable mirror device

Abstract: We demonstrate a technique for actuating micromirrors vertically cascaded on wafer fused GaAs-GaP photodiodes. Unlike traditional actuation schemes, the electrostatic drive of the individual capacitive actuators is addressed optically in this device. Vertical mirror displacements of up to 500 nm were observed using interferometry while addressing the photodetectors with a 5 mW optical signal. Microlenses were used to address a 900 pixel device with patterned conductive pillars and thin film load resistors for … Show more

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Cited by 11 publications
(2 citation statements)
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“…New solutions and technologies are developed for realising high actuator densities in DMs 3,4 as well as novel materials tested and manufactured [5][6][7][8] . A recently presented concept of a hysteretic deformable mirror (HDM) 9 for an exoplanetimaging space mission opens up the possibility of deploying an extremely dense actuator array where 2D memory piezoactuators are realized by placing a newly developed piezoelectric shape memory material between two orthogonal layers of electrodes as illustrated in Figure 1.…”
Section: Introductionmentioning
confidence: 99%
“…New solutions and technologies are developed for realising high actuator densities in DMs 3,4 as well as novel materials tested and manufactured [5][6][7][8] . A recently presented concept of a hysteretic deformable mirror (HDM) 9 for an exoplanetimaging space mission opens up the possibility of deploying an extremely dense actuator array where 2D memory piezoactuators are realized by placing a newly developed piezoelectric shape memory material between two orthogonal layers of electrodes as illustrated in Figure 1.…”
Section: Introductionmentioning
confidence: 99%
“…For this reason, new concepts have been developed in recent years that address these design aspects. Novel solutions and technologies were developed for realising high actuator densities in DMs [21,22] as well as advanced materials manufactured and tested. These materials include for example piezoelectric thin films with focus on having large displacements at low voltage levels and properties like memory effects [23][24][25][26].…”
Section: A C K N O W L E D G M E N T Smentioning
confidence: 99%