An Aluminum Nitride-Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer

Satija, Jyoti; Singh, Somnath; Zope, Anurag A.; Li, Sheng-Shian

doi:10.1109/jsen.2023.3290596

Cited by 7 publications

(3 citation statements)

References 24 publications

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“…Based on transducers that convert the applied acceleration perturbation into resonant frequency shifts or modal shape variations, the currently existing acceleration sensors are resonant sensors [19] and mode-localization sensors [20], respectively, where the proof mass works under a quasi-static state while the elastic beam works under a resonant state. The sensitivity of resonant sensors can be improved by differential resonators [21], multistage leverage mechanisms [22], and flexible resonant beams [19]. And the sensitivity of the mode-localized accelerometer can be improved by lowering the weak coupling coefficient [23].…”

Section: Introductionmentioning

confidence: 99%

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Li,

Jian,

Yang

et al. 2024

Micromachines

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This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from −68.91 μs/g to −124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: −68.91 μs/g and 10.21 mg; amplitude of 455 nm: −94.51 μs/g and 7.76 mg; amplitude of 342 nm: −124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.

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Section: Introductionmentioning

confidence: 99%

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Li,

Jian,

Yang

et al. 2024

Micromachines

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“…Such low eigenfrequencies cannot be reliably measured easily. This is often a problem in practice because these boundary conditions do not align with the standard use case for accelerometers [7,[14][15][16]. DC-coupled MEMS (Micro-Electro-Mechanical System) sensors have often been used in the low-frequency range due to their linear response in this range and their capability to measure constant accelerations, such as gravity [17].…”

Section: Introductionmentioning

confidence: 99%

“…Metrology 2024, 4, FOR PEER REVIEW 2 accelerometers [7,[14][15][16]. DC-coupled MEMS (Micro-Electro-Mechanical System) sensors have often been used in the low-frequency range due to their linear response in this range and their capability to measure constant accelerations, such as gravity [17].…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigation on the Transfer Behavior and Environmental Influences of Low-Noise Integrated Electronic Piezoelectric Acceleration Sensors

Bartels,

Xu,

Kang

et al. 2024

Metrology

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Acceleration sensors are vital for assessing engineering structures by measuring properties like natural frequencies. In practice, engineering structures often have low natural frequencies and face harsh environmental conditions. Understanding sensor behavior on such structures is crucial for reliable measurements. The research focus is on understanding the behavior of acceleration sensors in harsh environmental conditions within the low-frequency acceleration range. The main question is how to distinguish sensor behavior from structural influences to minimize errors in assessing engineering structure conditions. To investigate this, the sensors are tested using a long-stroke calibration unit under varying temperature and humidity conditions. Additionally, a mini-monitoring system configured with four IEPE sensors is applied to a small-scale support structure within a climate chamber. For the evaluation, a signal-energy approach is employed to distinguish sensor behavior from structural behavior. The findings show that IEPE sensors display temperature-dependent nonlinear transmission behavior within the low-frequency acceleration range, with humidity having negligible impact. To ensure accurate engineering structure assessment, it is crucial to separate sensor behavior from structural influences using signal energy in the time domain. This study underscores the need to compensate for systematic effects, preventing the underestimation of vibration energy at low temperatures and overestimation at higher temperatures when using IEPE sensors for engineering structure monitoring.

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