2020
DOI: 10.1109/jphot.2020.3001582
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An Amorphous (Al0.12Ga0.88)2O3 Deep Ultraviolet Photodetector

Abstract: The authors report the deposition of an (AlxGa1-x)2O3 amorphous thin film on sapphire substrates by sputter deposition. An amorphous deep ultraviolet (UV) (Al0.12Ga0.88)2O3 photodetector, with a cutoff wavelength at 230 nm, was also fabricated. With-10 V applied bias, it was found the dark leakage current and the linear dynamic range (LDR) of the fabricated photodetector were about 1.23×10-9 A and 59.51 dB, respectively. With the same-10 V applied bias, the UVC/UVA contrast ratio was larger than 20. With λillu… Show more

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Cited by 4 publications
(1 citation statement)
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“…Due to their low cost and ease of fabrication, semiconductor photovoltaic modules have found widespread applications in both military and civilian industries [1][2][3]. A photodetector possessing a broadband spectral response holds significant implications for sensing, imaging, optical communication, and energy harvesting [4][5][6][7][8]. Therefore, developing a photodetector with a broadband spectral response has become a primary research area.…”
Section: Introductionmentioning
confidence: 99%
“…Due to their low cost and ease of fabrication, semiconductor photovoltaic modules have found widespread applications in both military and civilian industries [1][2][3]. A photodetector possessing a broadband spectral response holds significant implications for sensing, imaging, optical communication, and energy harvesting [4][5][6][7][8]. Therefore, developing a photodetector with a broadband spectral response has become a primary research area.…”
Section: Introductionmentioning
confidence: 99%