2024
DOI: 10.1002/ente.202400956
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An Antiferroelectric‐Coated Metal Foam Infiltrated with Liquid Metal as a Dielectric Capacitor

Brendan Hanrahan,
Asher Leff,
Alexis Sesar
et al.

Abstract: Nickel metal foams serve as both a substrate and bottom electrode for a dielectric capacitor using atomic‐layer deposition (ALD) and a eutectic gallium–indium (EGaIn) liquid metal (LQM) counter electrode. The conformal dielectric has a composition of 6.25% Al–HfO2 in the antiferroelectric phase, confirmed with polarization versus electric field measurements. Liquid EGaIn is pressure‐infiltrated within the coated foams to form the dielectric capacitor. Capacitances up to 4 μF are realized. Calorimetry of the in… Show more

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