2022
DOI: 10.1002/jemt.24251
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An apparatus for plasma cleaning and storage of transmission electron microscopy specimens and specimen holders

Abstract: The transmission electron microscopy (TEM) specimen with thickness in nanometer scale is susceptible to hydrocarbon contamination and oxidation, and the specimen holder is also susceptible to contaminants, which would deteriorate the quality of TEM imaging and degrade the efficiency of TEM experiments. Conventional pretreat-

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