2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) 2016
DOI: 10.1109/marss.2016.7561712
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An automatic optical system for micro-defects inspection on 5 surfaces of a chip

Chih-Wen Chen
1
,
Ming-Fu Chen
2
,
Chih-Yen Chen
3
et al.
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