An electrochemical microactuator: principle and first results

Neagu, C.R.; Gardeniers, Han; Elwenspoek, M.; Kelly, J. J.

doi:10.1109/84.485209

Cited by 112 publications

(75 citation statements)

References 18 publications

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“…These bubbles cannot be easily terminated since the rate of the combustion reaction between the gases is negligibly low at room temperature and normal pressure. This is the main reason for a long response time observed in the DC electrolysis [19][20][21][22][23][24][25][26] . In the case of the alternating polarity process only nanobubbles are formed.…”

Section: Discussion Of the Response Timementioning

confidence: 99%

“…However, the electrochemical actuation is notoriously slow because to return the actuator in the initial state one has to terminate all the produced gas. It can be done by natural dissolution of the gas in a large volume of liquid that takes a long time (5 − 10 minutes) 19,20 , some authors using venting of the bubbles 23 , but the most advanced way is to initiate the reverse reaction between the gases, for example, using catalytic properties of platinized electrodes 26 . In the latter case the response time is considerably reduced but stays in the range of 100 s.…”

Section: Introductionmentioning

confidence: 99%

“…A special class of actuators uses the electrochemical process such as water decomposition to produce mechanical work [19][20][21][22][23][24][25][26] . In these devices the gas generated by water electrolysis pushes a flexible membrane.…”

Section: Introductionmentioning

confidence: 99%

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Electrochemical membrane microactuator with a millisecond response time

Uvarov

Lokhanin

Постников

et al. 2018

Sensors and Actuators B: Chemical

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Lack of fast and strong actuators to drive microsystems is well recognized. Electrochemical actuators are considered attractive for many applications but they have long response time (minutes) due to slow gas termination. Here an electrochemical actuator is presented for which the response time can be as short as 1ms. The alternating polarity water electrolysis is used to drive the device. In this process only nanobubbles are formed. The gas in nanobubbles can be terminated fast due to surface assisted reaction between hydrogen and oxygen that happens at room temperature. The working chamber of the actuator contains concentric titanium electrodes; it has a diameter of 500 µm and a height of 8 µm. The chamber is sealed by a polydimethylsiloxane (PDMS) membrane of 30µm thick. The device is characterized by an interferometer and a fast camera. Cyclic operation at frequency up to 667 Hz with a stroke of about 30% of the chamber volume is demonstrated. The cycles repeat themselves with high precision providing the volume strokes in picoliter range. Controlled explosions in the chamber can push the membrane up to 90 µm.

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Section: Discussion Of the Response Timementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Electrochemical membrane microactuator with a millisecond response time

Uvarov

Lokhanin

Постников

et al. 2018

Sensors and Actuators B: Chemical

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“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15] For these purposes, various actuation principles have been adopted including electrostatic, 2,3,6 thermal 4,14 or piezoelectric. 1,7 However, these methods present diverse limitations, making difficult their direct utilization in the final devices.…”

Section: Introductionmentioning

confidence: 99%

Highly Magneto-Responsive Elastomeric Films Created by a Two-Step Fabrication Process

Marchi

Casu

Bertora

et al. 2015

ACS Appl. Mater. Interfaces

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An innovative method for the preparation of elastomeric magnetic films with increased magneto-responsivity is presented. Polymeric films containing aligned magnetic microchains throughout their thickness are formed upon the magnetophoretic transport and assembly of microparticles during the polymer curing. The obtained films are subsequently magnetized at a high magnetic field of 3 T directed parallel to the microchains orientation. We prove that the combination of both, alignment of the particles along a favorable direction during 2 curing, and subsequent magnetization of the solid films induces an impressive increase of the films' deflection. Specifically, the displacements reach few millimeters, up to 85 times higher compared to the non-treated films with the same particles concentration. Such process can improve the performance of the magnetic films without increasing the amount of magnetic fillers, thus without compromising the mechanical properties of the resulting composites. The proposed method can be used for the fabrication of magnetic films suitable as components in systems where high displacements at relatively low magnetic fields are required, such as sensors, drug delivery or microfluidic systems, especially where remote control of valves is requested to achieve appropriate flow and mixing of liquids.

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“…Although under open circuit conditions the gas pressure built up in a previous electrolysis step should, in principle, remain constant, in practice this ideal situation is very difficult to achieve; the gas produced at one electrode (eg Pt [7j) may react at the other electrode (eg Cu [7]). One way to prevent this is to protect the second electrode with a semi-permeable membrane like Nafion@ [9]; this approach was followed in our earlier work 17, 81 and will be elaborated in this paper.…”

Section: Introductionmentioning

confidence: 99%

An electrochemical active valve

Neagu

Gardeniers

Elwenspoek

et al. 1997

Electrochimica Acta

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Abstract-Anovel electrochemical microactuator was developed, which operates as an active valve. The microactuator consists of an electrochemical cell and a membrane that deflects because of the pressure of oxygen gas generated by electrolysis. Relatively large pressures (up to tens of bars) can be reached with only low energy consumption (in the PW range). In a first prototype a Cu/aq. 1 M CuSOdPt system was used in an electrochemical cell with dimensions 2 x 2 x 1 mm3, fabricated with silicon micromachining and thin film deposition techniques. When the actuator was driven at 1.6 V and currents below 50 pA, pressures of 2 bar could be obtained within seconds, causing membrane deflections in the 30 to 70 pm range. It was found that, in order to improve the performance of the microactuator, it will be necessary to replace the Cu/Cu2 + electrode. A possible alternative is the Sb/Sb-oxide electrode. This system was studied by cyclic voltammetry and the first results are promising. 0 1997 Published by Elsevier Science Ltd

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An electrochemical microactuator: principle and first results

Abstract: Abstruct-

Cited by 112 publications

References 18 publications

Electrochemical membrane microactuator with a millisecond response time

Electrochemical membrane microactuator with a millisecond response time

Highly Magneto-Responsive Elastomeric Films Created by a Two-Step Fabrication Process

An electrochemical active valve

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