An Electromagnetic MEMS Actuator for Micropumps

Getpreecharsawas, Jirachai; Puchades, Ivan; Hournbuckle, Bobby; Fuller, Lynn; Pearson, Robert E.; Lyshevski, Sergey Edward

doi:10.1109/memstech.2006.288652

Cited by 19 publications

(5 citation statements)

References 11 publications

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“…They are used for dispensing the fluid at a specified rate. There lie various mechanisms for actuation within micropumps, namely electrostatic, 35 piezoelectric, 15 pneumatic, 36 thermo-pneumatic, electromagnetic, 37 electro-hydrodynamic, magneto-hydrodynamic, etc. Out of these mechanisms, piezoelectric actuation has been considered to be the most widely applied actuation scheme for pumping of fluids at the microscopic length scale.…”

Section: Microfluidicsmentioning

confidence: 99%

Biosensors on chip: A critical review from an aspect of micro/nanoscales

Bhatt

Bhattacharya

2019

Journal of Micromanufacturing

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Biosensors are a very well cherished research topic and have found an inseparable status from clinical diagnostics in specific and society at large. As the name suggests, biosensors or biological sensors are devices which detect the presence of biological entities or their constituents and derivatives. The field started decades ago and has matured quite well since its inception. The most important performance factors that are associated with biosensors are sensitivity, specificity, and limit of detection. The remaining efforts of the biosensor research domain focus on miniaturization aspects of the sensors. The growing advancements in this field have evolved the technology of biosensors to cater to full-scale diagnosis on microchips, bedside diagnostics, reduced cost, and increased speed of diagnostics. Biosensors are characterized through many different aspects; for example, one way is to classify them on the basis of the type of bio-recognition step that they would utilize or another way can be based on the type of detection scheme that they may integrate, etc. Depending on the bio-recognition layer’s properties, biosensors can be cell based, nucleic acid probe based, antibody/antigen based, or aptamer based, while depending on the type of detection scheme, biosensors can be viewed as colorimetric sensors, optical sensors, electrochemical sensors, mechanical sensors, etc. There are some other parallel areas of research like microfluidics and microelectromechanical systems where one of the main applications lies in the biosensor domain. This review article discusses the various aspects of biosensors, from their design, realization, to testing, along with various detection strategies. The assembly includes fabrication strategies particularly for microchip technology-based biosensing solutions, microchannels, integration to microfluidics, etc., while categorization deals with various kinds and applications of different biosensors.

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Section: Microfluidicsmentioning

confidence: 99%

Biosensors on chip: A critical review from an aspect of micro/nanoscales

Bhatt

Bhattacharya

2019

Journal of Micromanufacturing

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“…Once actuated, these devices consume minimal power to hold this state, as a dynamic current flow occurs exclusively during actuation [11], with typical overall power consumption resulting from charging and leakages of 0.05 to 0.1 mW [12]. In the case of thermal [13,14] and electromagnetic [15][16][17] actuators, however, the actuated state may require a constant current supply if the devices do not have an integrated latching mechanism of any nature (see [18][19][20] for examples of latching electrothermal MEMS switches, and Section 4 for examples of latching magnetic MEMS switches).…”

Section: Low Power Consumptionmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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“…The structure design and driving principles are the two key points for actuators. So far, various driving modes have been studied, such as thermal expansion [ 8 , 9 ], electrostatic force [ 10 , 11 , 12 ], piezoelectric effect [ 13 , 14 ], shape memory alloys [ 15 , 16 ], and electromagnetic force driving [ 17 , 18 , 19 ], and a hybrid of thermal and electromagnetic methods [ 20 ]. Additionally, metamaterials were designed as the driving units in the MEMS actuators in recent years [ 21 , 22 , 23 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

et al. 2021

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A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm3, consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-winding stators and a multipole rotator were adopted to increase the output torque of the actuator. The actuator’s working principle and magnetic circuit were analyzed. The calculation results show that the actuator’s output torque is decisive to the air gap’s magnetic flux density between the stators and the swing disc. NiFe alloy magnetic cores were embedded into each winding center to increase the magnetic flux density. A special manufacturing process was developed for fabricating the stator windings on the ferrite substrate. Six copper windings and NiFe magnetic cores were electroplated onto the ferrite substrates. The corresponding six magnetic poles were configured to the SmCo permanent magnet on the swing disc. A magnetizing device with a particular size was designed and fabricated to magnetize the permanent magnet of the swing disc. The actuator prototype was fabricated, and the performance was tested. The results show that the actuator has a large output torque (40 μNm), fast response (5 ms), and a large swing angle (22°).

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An Electromagnetic MEMS Actuator for Micropumps

Cited by 19 publications

References 11 publications

Biosensors on chip: A critical review from an aspect of micro/nanoscales

Biosensors on chip: A critical review from an aspect of micro/nanoscales

Integrated Magnetic MEMS Relays: Status of the Technology

Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch

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