An electrostatic induction micromotor supported on gas-lubricated bearings

Fréchette, Luc; Nagle, Steven F.; Ghodssi, Reza; Umans, S.D.; Schmidt, Martin; Lang, Jeffrey H.

doi:10.1109/memsys.2001.906535

Cited by 56 publications

(46 citation statements)

References 7 publications

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“…The devices suffer from low yield and short lifetime 15 . Only several rotary MEMS were made on each wafer and most of them just operated from a few seconds to a few hours 10,16 . Therefore, it is extremely difficult to apply techniques learned in MEMS to the fabrication of even smaller NEMS devices.…”

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confidence: 99%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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The development of rotary nanomotors is crucial for advancing nanoelectromechanical system technology. In this work, we report design, assembly and rotation of ordered arrays of nanomotors. The nanomotors are bottom-up assembled from nanoscale building blocks with nanowires as rotors, patterned nanomagnets as bearings and quadrupole microelectrodes as stators. Arrays of nanomotors rotate with controlled angle, speed (over 18,000 r.p.m.), and chirality by electric fields. Using analytical modelling, we reveal the fundamental nanoscale electrical, mechanical and magnetic interactions in the nanomotor system, which excellently agrees with experimental results and provides critical understanding for designing metallic nanoelectromechanical systems. The nanomotors can be continuously rotated for 15 h over 240,000 cycles. They are applied for controlled biochemical release and demonstrate releasing rate of biochemicals on nanoparticles that can be precisely tuned by mechanical rotations. The innovations reported in this research, from concept, design and actuation to application, are relevant to nanoelectromechanical system, nanomedicine, microfluidics and lab-on-a-chip architectures.

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confidence: 99%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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“…The friction and wear problems were less in wobble [9] and conical [10] micromotors, however, with a downfall in rotation speed. Noncontact-type bearings with more complicated support mechanisms like electrostatic [11] and pressurized air [12] levitation schemes have also been investigated. They show much less friction and almost no wear compared to contact-type bearings, with two major drawbacks: fabrication complexity and rotor instability.…”

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confidence: 99%

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Lin

Modafe

Shapiro

et al. 2004

IEEE Trans. Instrum. Meas.

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ISR develops, applies and teaches advanced methodologies of design and analysis toAbstract-Rolling element bearing is a well-known concept in macroscale machinery applications. They are prospective candidates for friction reduction in microelectromechanical system (MEMS), as well as for providing stable, robust support for moving micromechanisms. The characteristics of rolling element bearings need to be investigated to facilitate their applications in MEMS. It is well understood that the measured data on the macroscale cannot be directly applied to the microscale. This paper presents an in-situ noncontact experimental system to characterize the friction behavior of microball bearings on the microscale. The methodology presented in this paper provides a useful template to study the dynamical behavior of linear microball bearings with a variety of materials, geometries, and surface qualities. The system, actuated by a motor, affords wide ranges of motion for measuring the dynamic friction using a vision system. It allows the determination of the coefficient of friction (COF) without any interference due to the measurement system. With careful optimization, the error in measurement has been reduced to 2%. Different designs of microball bearings are proposed to achieve lower friction. The studied microball bearings demonstrated an average static COF of 0.01 and an average dynamic COF of 0.007 between stainless-steel and silicon-micromachined contacting surfaces at 27 C and 40% relative humidity.Index Terms-Microelectromechanical systems (MEMS), microball bearings, rolling friction, silicon micromachining, V-grooves.

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“…Since research on the creation of MEMS micromotors using silicon-based microfabrication techniques began in the 1980s, a number of electrostatic motor designs have been demonstrated [7,10]. The reported designs can be broadly classified as variable-capacitance motors, or electrostatic induction motors [11][12][13]. Variable-capacitance motors were the earliest successful MEMS electrostatic micromotors.…”

Section: Motor Designsmentioning

confidence: 99%

“…The conductivity of the rotor is chosen such that the image charges lag behind the stator excitation as they conduct through the rotor film. This gives rise to tangential electric field component that pulls the image charges and results in a torque on the rotor [13]. An induction motor with a rotor diameter of 4 mm has been developed by a team from Massachusetts Institute of Technology (MIT) for Power MEMS applications [12,18].…”

Section: Motor Designsmentioning

confidence: 99%

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Liu

Friend

Yeo

2010

Acoust. Sci. & Tech.

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Though miniaturization and mass production via integrated circuit fabrication techniques have transformed our society, the methods have yet to be successfully applied to the generation of motion, and as a consequence the many potential benefits of microrobotics has yet to be realized. The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. The scaling analyses show that electrostatic, electromagnetic and piezoelectric actuators all have comparable force scaling characteristics of F / L 2 ; if one employs permanent magnets, electromagnetic forces do not scale as F / L 4 . Though the torque, (, of piezoelectric ultrasonic motors scale rather poorly with ( / L 4 , they have the clear advantage of possessing torque amplitudes some two orders of magnitude larger than motors employing the other transduction schemes at the micro scale.

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An electrostatic induction micromotor supported on gas-lubricated bearings

Cited by 56 publications

References 7 publications

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

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