2010
DOI: 10.1016/j.sna.2010.07.023
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An electrostatic master–slave mechanism with force enhancement by external inductors for cancellation of self- and parasitic capacitances

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Cited by 3 publications
(2 citation statements)
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References 26 publications
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“…By moving the rotor from the full‐alignment position to the non‐alignment position, the capacitance characteristic is obtained and the 4×4 matrix is formed. An LCZ metre is used to measure the capacitance characteristic [23,24]. The measurement procedure involves changing the position of the rotor electrodes from the non‐alignment position with the stator electrodes to the full alignment position and all the capacitance values are accurately measured.…”
Section: Discussion and Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…By moving the rotor from the full‐alignment position to the non‐alignment position, the capacitance characteristic is obtained and the 4×4 matrix is formed. An LCZ metre is used to measure the capacitance characteristic [23,24]. The measurement procedure involves changing the position of the rotor electrodes from the non‐alignment position with the stator electrodes to the full alignment position and all the capacitance values are accurately measured.…”
Section: Discussion and Resultsmentioning
confidence: 99%
“…In references [16,21], modelling of a linear variable capacitance machine (VCM) machine is described considering the effects of capacitance imbalance, while the capacitance matrix is obtained both through numerical methods and the experimental measurements (EXP). Also, several simple and useful methods are introduced in [22][23][24] for measuring the self and mutual capacitances of the VCM machines experimentally. In this regard, finite element (FE)-based simulations have been well recognized as the other powerful conventional methodologies for evaluating all elements of the capacitance matrix [25][26][27].…”
Section: Introductionmentioning
confidence: 99%