An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation

Hu, Fangrong; Wang, Weimin; Yao, Jun

doi:10.1088/0960-1317/21/11/115029

Cited by 23 publications

(14 citation statements)

References 24 publications

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“…Again, the stroke is not controllable as pull-in occurs when the actuator is activated. Hu et al [19] presented a conical electrostatic actuator made of polysilicon. The actuator has a side length of more than 250 µm, and was reported to have 2.7 µm at 50 V, while the resonant frequency is not reported.…”

Section: Design and Simulationsmentioning

confidence: 99%

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Zhou

Shafai

Dietrich

2019

J. Micro/Nanolith. MEMS MOEMS

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A new electrostatic actuator for a double layer deformable mirror with continuous phase sheet is presented. The electrostatic actuator employs an upper electrode consisting of multiple Archimedean spiral spring arms supporting a small mass central attachment point, and is capable of separate the parameters of actuation voltage, spring constant, and resonance. The feature reduces the complexity in the designing of a double layer deformable mirror with continuous phase sheet that are widely employed in the adaptive optics area of astronomy. The fabricated device has a diameter of 1250 µm with 4 single crystal silicon spiral arms each having a length of 6030 µm, thickness of 15 µm, and width of 30 µm. The actuator was simulated and tested to have a resonant frequency above 2600 Hz, and was simulated to be capable of reaching approximately 5 µm displacement with a drive voltage of less than 30 V with an actuator-electrode separation of 15 µm, based on performance parameter found experimentally.

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Section: Design and Simulationsmentioning

confidence: 99%

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Zhou

Shafai

Dietrich

2019

J. Micro/Nanolith. MEMS MOEMS

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“…These suggested external mechanical structures presented excellent success in amplifying the displacements of the electromechanical micro-and nano-devices, however revealed practical limits on the amplification factor, as well as penalties on the overall actuator performance. In addition, few efforts [6][7][8] have been successful in designing such actuators and are mainly in the micro-scale such as the work done by Rosset et al [6]. They built a dielectric elastomer (DE) based actuator that showed promising characteristics such as: flexibility in bending (compliant), high-deformation strains (hence large-stroke), and highconductivity.…”

Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

“…This amendment in their proposed design allowed not only larger stroke, but also helped in delaying the initiation of the pull-in instability and therefore provide greater actuation stroke. Hu et al [8] explored the possibility to use an electrostatic-repulsive spring based actuator as a method to achieve large strokes and get rid of any structural instability. Their micro-actuator design shows encouraging use in various applications such as: switches, relays, inductors, and MEMS micro-mirrors.…”

Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

Ouakad

2018

J Braz. Soc. Mech. Sci. Eng.

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In this numerical investigation, the nonlinear structural response of an electrostatic carbon nanotube (CNT) based nanoactuator assuming a non-parallel (out-of-plane) plates actuation configuration is examined. The actuating force is initiated by the asymmetry of the resultant electric fringing-fields caused mainly due to the non-parallel electrodes scheme. The nano-actuator is designed based on a carbon nanotube flexible moving electrode and two symmetrically located actuating stationary rectangular-shaped out-of-plane electrodes. First, the electrical problem of the nano-actuator is numerically solved to acquire the resultant actuating force. The force is then mathematically approximated from the outcomes of a 2D numerical solution of the electric problem via a finite-element-based numerical analysis. Then, the structural behavior of the CNT-based nano-actuator under the effect the resultant non-parallel electric fields is investigated numerically via a modal expansion process. The electro-mechanical model was constructed based on an Euler-Bernoulli continuous nonlinear beam model, where both the mid-plane stretching (geometric nonlinearity) and the electric non-parallel fringingfields effects have been taken into consideration. The reduced-order model (ROM) was derived using the Galerkin decomposition via modal decomposition process. The resultant nonlinear equations are solved numerically to get the static response of the considered CNT-based nano-actuator for various DC voltages. The eigenvalue problem is afterward derived and studied to get the variation of the fundamental as well as higher-order natural frequencies when the system is deflected by a non-zero DC amplitude. A detailed parametric study indicates an opportunity of having larger stroke as well as higher fundamental natural frequency for such CNT-based nano-actuator function of the assumed DC voltage amplitude, enabling it to be used as a tunable NEMS-based device without any pull-in scenario.

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“…A large number of electrostatic actuators are developed to avoid the pull-in effect [25][26][27][28][29][30][31][32][33][34][35][36]. In which, a MEMS repulsive actuator has been developed to avoid the pull-in effect completely while delivering large out-of-plane stroke [25][26][27][28][29][30][31].…”

Section: Electrostatic Actuators [20] [25]mentioning

confidence: 99%

Development of a MEMS repulsive actuator for large out-of-plane force

Khan¹,

Mrad²

2014

J. Micromech. Microeng.

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This thesis describes the development of a MEMS repulsive actuator capable of producing a large out-of-plane force. Existing MEMS repulsive actuators are low out-of-plane force actuators that are unable to support or lift a mass of 1 mg. A high force MEMS repulsive actuator was developed to overcome this limitation. The design was optimized employing parameters of the actuator's fingers to increase the out-of-plane force. A design was developed based on the analytical results derived from extending the mathematical model of an existing actuator. A commercial manufacturing process, PolyMUMPs, was used to fabricate a prototype which was tested to validate the analytical and computational results. The prototype achieved an out-of-plane displacement of 15 µm and a 0.2° angular rotation. The resonance frequency was 120 Hz, and the rise and fall times were measured as 14.5 ms and 3625 ms (3.6 sec), respectively. The estimated out-of-plane force is 40 µN.iii ACKNOWLEDGEMENT

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An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation

Cited by 23 publications

References 24 publications

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

Development of a MEMS repulsive actuator for large out-of-plane force

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