Guidance, Navigation and Control Conference 1989
DOI: 10.2514/6.1989-3438
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An electrostatically rebalanced micromechanical accelerometer

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“…A double-anchored, quad bean suspension provides better linearity compared with a dual cantilever suspension [58,59] . Acceleration can be measured capacitively with torsional structures, where an asymmetrically shaped plate is suspended by torsional bars mounted on a pedestal and is free to rotate around the torsion bar axis [60][61][62] . Due to the asymmetry, the plate is heavier on one side and lighter on the other side.…”
Section: Mechanical Suspensionmentioning
confidence: 99%
“…A double-anchored, quad bean suspension provides better linearity compared with a dual cantilever suspension [58,59] . Acceleration can be measured capacitively with torsional structures, where an asymmetrically shaped plate is suspended by torsional bars mounted on a pedestal and is free to rotate around the torsion bar axis [60][61][62] . Due to the asymmetry, the plate is heavier on one side and lighter on the other side.…”
Section: Mechanical Suspensionmentioning
confidence: 99%