An emittance scanning device for liquid metal ion sources

Löffelmacher, D.; Adamczewski, J.; Stephan, A.; Meijer, Jan; Röcken, H.; Bukow, H.H.; Rolfs, C.

doi:10.1016/s0168-583x(98)00033-0

Cited by 6 publications

(4 citation statements)

References 4 publications

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“…Typical sources have a virtual size of about 50 nm and emit up to 10 μA of current into a half-angle of approximately 20°. , Usually the beam is apertured to a current of ∼10 pA and a half-angle of ∼0.5 mrad. These parameters correspond to a theoretically predicted emittance of 1.1 × 10 −6 π mm mrad M e V and a brightness of 10 to 100 A cm −2 sr −1 eV −1 . − …”

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confidence: 78%

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Magneto-Optical-Trap-Based, High Brightness Ion Source for Use as a Nanoscale Probe

et al. 2008

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We report on the demonstration of a low emittance, high brightness ion source based on magneto-optically trapped neutral atoms. Our source has ion optical properties comparable to or better than those of the commonly used liquid metal ion source. In addition, it has several advantages that offer new possibilities, including high resolution ion microscopy with ion species tailored for specific applications, contamination-free ion milling, and nanoscale implantation of a variety of elements, either in large quantities, or one at a time, deterministically. Using laser-cooled Cr atoms, we create an ion beam with a normalized rms (root-mean-square) emittance of 6.0 x 10 (-7) mm mrad M e V and approximately 0.25 pA of current, yielding a brightness as high as 2.25 A cm (-2) sr (-1) eV (-1). These values of emittance and brightness show that, with suitable ion optics, an ion beam with a useful amount of current can be produced and focused to spot sizes of less than 1 nm.

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confidence: 78%

“…These parameters correspond to a theoretically predicted emittance of 1.1 × 10 -6 π mm mrad √MeV and a brightness of 10 to 100 A cm -2 sr -1 eV -1 . [15][16][17] The MOTIS achieves low emittance from a different perspective. Instead of using a small source size to reduce the emittance, the MOTIS uses small angular spread to achieve the same result.…”

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confidence: 99%

Magneto-Optical-Trap-Based, High Brightness Ion Source for Use as a Nanoscale Probe

et al. 2008

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“…Even though the beam emitted from an LMIS has a large divergence [18,19], it can be used to generate beams with very low transverse emittance, since it originates from a spot with diameter of less than 100 nm. We restrict the beam to a 2-mm diameter aperture in a distance of 200 mm from the emitter and estimate a normalized emittance of 10-50 π mm mrad √ eV by comparing the transmission through the pinhole with the divergence angles measured with a similar LMIS [7,20].…”

Section: Methodsmentioning

confidence: 99%

Transition Frequencies and Hyperfine Structure in $^{113,115}$In$^+$: Application of a Liquid-Metal Ion Source for Collinear Laser Spectroscopy

König,

Krämer,

Imgram

et al. 2020

Preprint

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We demonstrate the first application of a liquid-metal ion source for collinear laser spectroscopy in proof-of-principle measurements on naturally abundant In + . The superior beam quality, i.e., the actively stabilized current and energy of a beam with very low transverse emittance, allowed us to perform precision spectroscopy on the 5s 2 1 S0 → 5s5p 3 P1 intercombination transition in 115 In + , which is to our knowledge the slowest transition measured with collinear fluorescence laser spectroscopy so far. By applying collinear and anticollinear spectroscopy, we improved the center-ofgravity frequency νcg = 1 299 617 759. 3 (1.2) and the hyperfine constants A = 6957.19 (28) MHz and B = −443.7 (2.4) MHz by more than two orders of magnitude. A similar accuracy was reached for 113 In + in combination with literature data and the isotope shift between both naturally abundant isotopes was deduced to ν( 113 In) − ν( 115In) = 696.3 (3.1) MHz. Nuclear alignment induced by optical pumping in a preparation section of the ion beamline was demonstrated as a pump-andprobe approach to provide sharp features on top of the Doppler broadened resonance profile.

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“…In SI units, the LMIS brightness [17][18][19] is between (10 5 and 10 6 ) Am -2 sr -1 eV -1 . In more convenient units, this brightness can be expressed as being between (10 -4 and 10 -3 ) pA nm -2 µsr -1 keV -1 .…”

Section: IImentioning

confidence: 99%

Focused chromium ion beam

Steele

Knuffman

McClelland

et al. 2010

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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With the goal of expanding the capabilities of focused ion beam microscopy and milling systems, we have demonstrated nanoscale focusing of chromium ions produced in a magnetooptical trap ion source (MOTIS). Neutral chromium atoms are captured into a magneto-optical trap and cooled to 100 µK with laser light at 425 nm. The atoms are subsequently photoionized and accelerated to energies between 0.5 keV and 3 keV. The accelerated ion beam is scanned with a dipolar deflector and focused onto a sample by an einzel lens. Secondary electron images are collected and analyzed, and from these a beam diameter is inferred. The result is a focused probe with a one-standard-deviation radius as small as 205±10 nm. While this probe size is in the useful range for nanoscale applications, it is almost three times larger than is predicted by ray-tracing simulations. Possible explanations for this discrepancy are discussed.

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An emittance scanning device for liquid metal ion sources

Cited by 6 publications

References 4 publications

Magneto-Optical-Trap-Based, High Brightness Ion Source for Use as a Nanoscale Probe

Magneto-Optical-Trap-Based, High Brightness Ion Source for Use as a Nanoscale Probe

Transition Frequencies and Hyperfine Structure in $^{113,115}$In$^+$: Application of a Liquid-Metal Ion Source for Collinear Laser Spectroscopy

Focused chromium ion beam

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