The accurate description of the indentation load-displacement relationship of an elastic sharp indenter indenting into an elastic half-space is critical for analyzing the nanoindentation data of superhard materials using the procedure proposed by Oliver and Pharr [J. Mater. Res. 7, 1564(1992 2296 (1999)], the errors induced by the application of reduced modulus should be considered at the same time in correcting the modified Sneddon's solution. In the present work, for the diamond indenter of 70.3°indenting into an elastic half-space with its Poisson's ratio varying from 0.0 to 0.5 and the ratio of the Young's modulus of the indented material to that of the diamond indenter, E material /E indenter , varying from 0 to 1, a set of new correction factors are proposed based on finite element analysis. The results reported here should provide insights into the analysis of the nanoindentation load-displacement data when using a diamond indenter to determine the hardness and Young's modulus of superhard materials.