2009
DOI: 10.1063/1.3223316
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An energy-based model to predict wear in nanocrystalline diamond atomic force microscopy tips

Abstract: Atomic force microscopy ͑AFM͒ is one of the most powerful techniques to probe surfaces and material properties at the nanoscale, and pattern organic and inorganic molecules. In all cases, knowledge of the tip geometry and its evolution with continued use is essential. In this work, a broadly applicable energy model for the evolution of scanning probe tip radii during use is presented based on quantitative wear experiments. Experiments were conducted using AFM probes made of both undoped and nitrogen-doped diam… Show more

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Cited by 33 publications
(23 citation statements)
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“…7a, with tips and cantilevers are all made from BD-UNCD using a molding technique that involves forming the tip by depositing the diamond onto Si wafers with V-groove pits etched into them, then dissolving the Si. [48][49] Since the grain size for BD-UNCD is smaller than other types of boron doped diamond, BD-UNCD is able to fill the tip molds very accurately and continuously, and the curvature of the released cantilevers of the probes can be close to zero due to precise stress control during the BD-UNCD deposition. The resulting probesÕ typical tip radii can be as small as 20-50 nm (Fig.…”
Section: Robust Wear-resistant Conductive Afm Probesmentioning
confidence: 99%
“…7a, with tips and cantilevers are all made from BD-UNCD using a molding technique that involves forming the tip by depositing the diamond onto Si wafers with V-groove pits etched into them, then dissolving the Si. [48][49] Since the grain size for BD-UNCD is smaller than other types of boron doped diamond, BD-UNCD is able to fill the tip molds very accurately and continuously, and the curvature of the released cantilevers of the probes can be close to zero due to precise stress control during the BD-UNCD deposition. The resulting probesÕ typical tip radii can be as small as 20-50 nm (Fig.…”
Section: Robust Wear-resistant Conductive Afm Probesmentioning
confidence: 99%
“…Inspired by (i) our recent study (19) that revealed the critical importance of the junction shear strength (τ ) on debris particle formation and (ii) macroscopic laboratory observations of a linear correlation between the tangential work and wear volume (7,25,27,28), we examined the relationship between tangential work and the volume of resultant debris particles. Remarkably, we found that, at the debris level, these two quantities are related with a proportionality constant of 1/τ across the wide range of simulations performed in this work (Fig.…”
Section: Significancementioning
confidence: 99%
“…The atomic volume of silicon (vol atom ) is taken as 0.02 nm 3 with an activation energy act value of 0.9 eV [14]. Based on the experimental conditions, the impact velocity is approximately in the range of 2-3 m/s and the impact force is estimated in the range of 20-50 nN assuming the angle of impact to be normal.…”
Section: Experimental Verificationmentioning
confidence: 99%
“…Earlier studies using scanning electron microscopy (SEM) imaging have shown that tool wear in the VANILA process is comparatively lower than that in other nanomachining processes such as nanoscratching and nanoindentation involving direct tool contact with the workpiece (Figure 3) [2]. The accuracy and precision of any tip-based nanomachining process is limited by the tip's sharpness, material, and geometry [3]. The level of precision of the nanomachined features continuously degrades during the machining process as the probe tip inevitably wears resulting in an increase of contact diameter and forces acting on it [3].…”
Section: Introductionmentioning
confidence: 99%
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