2017
DOI: 10.1016/j.solmat.2017.06.022
|View full text |Cite
|
Sign up to set email alerts
|

An enhanced alneal process to produce SRV < 1 cm/s in 1 Ω cm n-type Si

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
20
0

Year Published

2017
2017
2023
2023

Publication Types

Select...
7

Relationship

2
5

Authors

Journals

citations
Cited by 25 publications
(21 citation statements)
references
References 43 publications
1
20
0
Order By: Relevance
“…. Recently, Collett et al reported an enhanced alneal process whereby charges are introduced into the oxide film at the same time hydrogenation takes place. They demonstrated the introduction of charged ionic species which provide field‐effect passivation to the underlying silicon, and reported SRV of 0.5 cm s −1 on n‐type 1 Ωcm silicon, surpassing that achieved by Kerr and Cuevas.…”
Section: Materials and Methods For Silicon Surface Passivationmentioning
confidence: 99%
“…. Recently, Collett et al reported an enhanced alneal process whereby charges are introduced into the oxide film at the same time hydrogenation takes place. They demonstrated the introduction of charged ionic species which provide field‐effect passivation to the underlying silicon, and reported SRV of 0.5 cm s −1 on n‐type 1 Ωcm silicon, surpassing that achieved by Kerr and Cuevas.…”
Section: Materials and Methods For Silicon Surface Passivationmentioning
confidence: 99%
“…The Auger recombination in our carrier-transport calculations is implemented using the state-of-the-art improved Auger model 11 . The surface recombination at the Si − SiO 2 interface is implemented using a microscopic, SRH recombination statistics-based model 46 (more details are given in the “Methods” section) that complies with the experimental data of 11,4749 . In all our computations involving inverted-pyramid PhC solar cells, the contact SRVs are chosen to be 10 cm / s .…”
Section: Solar Cell Geometry and Numerical Detailsmentioning
confidence: 99%
“…This concentration was selected as it was shown in Fig 6 to cause an interface charge of ~1.7 × 10 12 q/cm 2 , and in Fig 3 produced the highest effective lifetime. This quantity of interface charge has also been shown to provide outstanding effective lifetimes and FEP previously [18].…”
Section: B Anneal Temperature and Timementioning
confidence: 91%
“…This concentration was confirmed using Thermally Stimulated Ionic Conduction (TSIC) measurements of a metal-oxide-semiconductor (MOS) structure fabricated from the ion deposited oxide, using ebeam deposited aluminium as the gate metal. Details of TSIC can be found in [18], [19].…”
Section: Experimental Methodsmentioning
confidence: 99%