An EP-SAW for measurements of particulate matter in ambient air

Stanley, Simon; McHale, Glen; Newton, Michael I.; Percival, Carl J.; Evans, Carl

doi:10.1080/10589750512331330446

Cited by 3 publications

(3 citation statements)

References 6 publications

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“…Figures 13 and 14 show the change in the resonance frequency and quality factor of the resonator shown in figure 12 versus the overall exposure time. To calculate the particle mass density in the air sample, equation (8) can be used to calculate the mass flow of the air entering the chamber (w) [9]:…”

Section: Airborne Particle Mass Density Measurementmentioning

confidence: 99%

“…where t indicates the exposure time. Based on the measurement results and using equations (8) and (9), a value of 14.2 μg m −3 was calculated for aerosol concentration in the lab environment. According to the annual environmental protection agency (EPA) report, the average PM2.5 (particles less than 2.5 μm diameter) for Denver in 2008 was ∼7.35 μg m −3 while PM10 was ∼25.8 μg m −3 .…”

Section: Airborne Particle Mass Density Measurementmentioning

confidence: 99%

“…Commonly used existing versions of such sensors are either based on optical measurement techniques such as nephelometry [4] and polychromatic LED techniques [5], scanning electron microscopy (SEM) [6], or conventional resonant mass sensors such as surface acoustic wave (SAW) resonators [7,8] resulting in sophisticated, immense and costly instruments that in some cases do not provide the desired sensitivity level [7,9]. MEMS/NEMS resonators [10][11][12][13][14][15][16][17][18][19], as low-cost highly integrated and ultra-sensitive mass sensors, can potentially provide new opportunities and unprecedented capabilities in this area.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Hajjam

Wilson

Rahafrooz

et al. 2010

J. Micromech. Microeng.

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This paper, the second of two parts, presents extensive measurement and characterization results on fabricated thermally actuated single-crystal silicon MEMS resonators analyzed in part I. The resonators have been fabricated using a single mask process on SOI substrates. Resonant frequencies in a few hundreds of kHz to a few MHz and equivalent motional conductances as high as 102 mA V −1 have been measured for the fabricated resonators. The measurement results have been compared to the resonator characteristics predicted by the model developed in part I showing a good agreement between the two. Despite the relatively low frequencies, high quality factors (Q) of the order of a few thousand have been measured for the resonators under atmospheric pressure. The mass sensitivities of some of the resonators were characterized by embedding them in a custom-made test setup and deposition of artificially generated aerosol particles with known size and composition. The resulting measured mass sensitivities are of the order of tens to hundreds of Hz ng −1 and are in agreement with the expected values based on the resonator's physical dimensions. Finally, measurement of mass density of arbitrary airborne particles in the surrounding lab environment has been demonstrated.

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Section: Airborne Particle Mass Density Measurementmentioning

confidence: 99%

Section: Airborne Particle Mass Density Measurementmentioning

confidence: 99%