2007
DOI: 10.1002/adfm.200700098
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An Epoxy Photoresist Modified by Luminescent Nanocrystals for the Fabrication of 3D High‐Aspect‐Ratio Microstructures

Abstract: An epoxy‐based negative‐tone photoresist, which is known as a suitable material for high‐aspect‐ratio surface micromachining, is functionalized with red‐light‐emitting CdSe@ZnS nanocrystals (NCs). The proper selection of a common solvent for the NCs and the resist is found to be critical for the efficient incorporation of the NCs in the epoxy matrix. The NC‐modified resist can be patterned by standard UV lithography down to micrometer‐scale resolution, and high‐aspect‐ratio structures have been successfully fa… Show more

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Cited by 49 publications
(44 citation statements)
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“…Fluorescence microscopy images and emission spectra (bottom panel) of the microstructures obtained from the CdSe@ZnS NC modified (a) and unmodified (b) epoxy resist [106]. …”
Section: Patterning Towards Devices: Conventional and Unconventionmentioning
confidence: 99%
“…Fluorescence microscopy images and emission spectra (bottom panel) of the microstructures obtained from the CdSe@ZnS NC modified (a) and unmodified (b) epoxy resist [106]. …”
Section: Patterning Towards Devices: Conventional and Unconventionmentioning
confidence: 99%
“…mechanical flexibility, low weight, and prompt processability) [24][25][26][27][28]. Such multifunctional materials can be successfully used in high-added-value applications for fabricating components of catalysts, protective coatings, varnishes, packages, sensors, lenses, electronics, mechanics, dental fillings, molds, inks, and adhesives [29][30][31][32]. Interestingly, nanocomposite materials offer the opportunity to incorporate in the same host matrix multiple functions deriving from distinct types of nanocatalysts such as semiconductor nanoparticles (NPs) (i.e.…”
Section: Introductionmentioning
confidence: 99%
“…Polymeric nanocomposites (PNCs) can also be exploited as a resist for optical or electron-beam lithography, allowing the fabrication of hybrid micro-structures having magnetic [2], high-luminescence [3,4], or conductive [5] features depending on the encapsulated NPs. In particular, iron oxide nanoparticles (IONPs) are very useful for PNCs synthesis by virtue of their biocompatibility and magnetic properties related to their type, size and shape [6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%