An exact algorithm for self-calibration of two-dimensional precision metrology stages

Ye, J.; Takac, Michael T.; Berglund, C. N.; Owen, G.; Pease, R. F. W.

doi:10.1016/s0141-6359(97)00005-6

Cited by 78 publications

(77 citation statements)

References 2 publications

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“…A calibration and compensation process [30,31] is necessary to improve the positioning accuracy to sub-micron level over the entire working range of the stage. A higher degree-of-freedom system is desired for measurement and control of out-of-plane motions of the stage, including pitching (θ X ), rolling (θ Y ) as well as the Z-directional position.…”

Section: Discussionmentioning

confidence: 99%

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Gao

Dejima

Yanai

et al. 2004

Precision Engineering

125

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Section: Discussionmentioning

confidence: 99%

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Gao

Dejima

Yanai

et al. 2004

Precision Engineering

125

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“…Terdapat jenis-jenis metode rehearsal lainnya yang tidak dibahas dalam bab ini, seperti metode untuk wahana pergerakan 2D (Ye et al 1997).…”

Section: Dasar-dasar Metode Rehearsal Untuk Pemisahan Error Dan Self-unclassified

Metrologi manufaktur: Pengukuran geometri dan analisis ketidakpastian

Syam¹

2018

Preprint

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Metrologi adalah ilmu pengukuran. Dalam industri manufaktur, pengukuran geometri dan analisis ketidakpastian dari hasil pengukuran merupakan hal yang sangat penting dalam metrologi untuk manufaktur. Dengan metrologi manufaktur, kualitas produk dan efisiensi produksi yang tinggi dapat direalisasikan. Buku ini membahas aspek-aspek dari metrologi manufaktur dari sejarah pengukuran dimensi dan geometri, dasar-dasar statistika, toleransi dimensi dan geometri, pengukuran dimensi dan geometri, CMM berbasis kontak, CMM berbasis non-kontak, algoritma fitting, kompensasi error, ketidakastian sampai dengan keuntungan ekonomi dari metrologi manufaktur.

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“…Self-calibration approaches are typically used [70,[79][80][81][82]. For the calibration of large machine tools, a large artifact of the required geometric accuracy is needed, which is often difficult and/or expensive.…”

Section: Measurement Of Artifactsmentioning

confidence: 99%

Indirect Measurement of Volumetric Accuracy for Three-Axis and Five-Axis Machine Tools: A Review

Ibaraki¹,

Knapp²

2012

Int. J. Automation Technol.

226

100

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The volumetric accuracy of machine tools is represented by a map of position and orientation error vectors of the tool over the volume concerned. Numerical compensation for volumetric error is possible in many latest commercial CNCs for machine tools. This paper reviews indirect measurement schemes for machine tool kinematics, in which the tool center position is measured as the superposition of error motions of linear or rotary axes. Each error motion can be separately identified by best-fitting a set of measured tool center positions to the kinematic model of machine tools. Indirect measurement schemes for the kinematics of three orthogonal linear axes, as well as the fiveaxis kinematics with two rotary axes, will be reviewed.

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An exact algorithm for self-calibration of two-dimensional precision metrology stages

Cited by 78 publications

References 2 publications

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Metrologi manufaktur: Pengukuran geometri dan analisis ketidakpastian

Indirect Measurement of Volumetric Accuracy for Three-Axis and Five-Axis Machine Tools: A Review

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