An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test

Qiao, Deli; Zhao, Rong; Zhang, Yalong; Xia, Changquan; Song, Xiumin; You, Qiaoming

doi:10.1016/j.microrel.2017.07.062

Cited by 3 publications

(3 citation statements)

References 15 publications

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“…Comb-actuated MEMS scanning mirrors of resonant type receive much attention thanks to their compactness, * Author to whom any correspondence should be addressed. large electrostatic force density, ease of integration in electron systems, and long lifetime [5,6]. The device can be operated as a resonator to achieve a large scan angle around its oscillation frequency.…”

Section: Introductionmentioning

confidence: 99%

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Chen,

Luo,

Tavakkoli

et al. 2024

J. Micromech. Microeng.

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This paper proposes an efficient nonlinear one-dimensional(1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant MEMS mirrors with cascaded structure The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes using a 4-inch SOI wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method (FEM) model (0.8s versus 1h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.

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Section: Introductionmentioning

confidence: 99%

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Chen,

Luo,

Tavakkoli

et al. 2024

J. Micromech. Microeng.

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show abstract

“…Frequency drift occurs in the MEMS resonator under high-frequency cycling. 19,20 In addition, temperature and relative humidity (RH) also have a certain influence on the reliability of the MEMS resonator. [21][22][23] However, studies on the reliability of 3D-printed resonators are scarce.…”

Section: Introductionmentioning

confidence: 99%

“…Dynamic reliability of the MEMS resonator has been extensively studied. Frequency drift occurs in the MEMS resonator under high‐frequency cycling 19,20 . In addition, temperature and relative humidity (RH) also have a certain influence on the reliability of the MEMS resonator 21–23 .…”

Section: Introductionmentioning

confidence: 99%

Design, preparation, and reliability testing of low‐cost 3D‐printed ABS scanner

Chen

2023

Journal of Polymer Science

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Scanning mirrors can deflect, reflect, and pattern the laser beam. Traditional laser galvanometers rely on deflection motors and mirrors, which are bulky and costly. Micro‐electro‐mechanical systems (MEMS) micromirrors have small size and high integration, but they require long preparation cycles and sophisticated equipment and expensive materials. Polymer scanners prepared by 3D printing technology have the advantages of low cost and rapid preparation, but their reliability needs further study. In this study, a single‐axis electromagnetic scanner was proposed and tested for reliability. The mechanical structure of the scanning mirror is prepared by fused deposition modeling (FDM) using acrylonitrile butadiene styrene (ABS) as material, the radial magnetic field is provided by neodymium magnet set, and laser patterned copper foil serves as the drive coil. The prepared scanner achieved an optical scan angle of 45.2° at a resonant state of 276 Hz. The effect of temperature and humidity on the device reliability is investigated experimentally. Temperature has a significant influence on the resonance frequency and scanning angle of ABS‐based scanner. In addition, the change of relative humidity has less effect on the scanner. The five scanners tested were still working properly after 240 h (more than 2 × 108 cycles) of testing without failures and less than 1.5% frequency drift has been observed.

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Electromechanical Analyses of 1 x n MEMS-based Optical Switch with Microplate Reflector

Herrera-Martinez

Khotiaintsev

Timofeyev

2020

2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO)

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An exploration for the degradation behavior of 2-D electrostatic microscanners by accelerated lifetime test

Cited by 3 publications

References 15 publications

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Design, preparation, and reliability testing of low‐cost 3D‐printed ABS scanner

Electromechanical Analyses of 1 x n MEMS-based Optical Switch with Microplate Reflector

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