An extreme ultraviolet radiation source based on a gas discharge plasma

Abstract

An extreme ultraviolet radiation source that emits in the spectral range around 13 nm wavelength or 100 eV photon energy is discussed. The source is based on a small pinch plasma which is generated in a fast discharge of electrically stored energy in the range of 1 Joule. Theoretical considerations are presented which show that this energy is close to the minimal required energy for a dynamic pinch plasma which effectively emits radiation in the spectral range of interest. Here, the constraints given by the gas discharge apparatus have to be taken into account. These constraints refer to, e.g., the length of the plasma column or the achievable compression or number density.