“…Further, in the field of vacuum micro-and nano electronics [4e7], field emitter arrays (FEAs), integrated with microscale and nanoscale field-emission-type electron sources, have been developed for various applications using the advantage of field emission electron beams, such as field emission displays [8,9], field emission lamps [10,11], small X-ray sources [12e14], high-frequency devices [15], and electric power switching devices [16,17]. To date, semiconductor nanofabrication processes have been used to fabricate different types of field emission electron sources to achieve better FE characteristics and stability, such as the Spindt type [18] and Si type [19] which were suitable for mass production, normal-gate type [20,21], under-gate type [22,23], planar-gate type [24,25] and surface-conduction field emission electron sources [26e28]. Compared with other electron sources, the surface-conduction field emission electron sources based on a planar-gate-type triode have many advantages such as simple structure and fabrication processes, which have been paid much attention due to a lower driving voltage and excellent field emission characteristics.…”