In the reported low-fluorine MOD-YBCO studies, the lowest F/Ba mole ratio of the precursor solution was 4.5. However, further lowering the F/Ba ratio is important according to the researches of YBCO thick film. On the other hand, the F/Ba ratio is necessary to be at least 2 for the full conversion of the Ba precursor to BaF2 to avoid the formation of BaCO3, which is detrimental to the superconducting performance. In this study, a novel solution with the F/Ba mole ratio of 2 was developed, in which the fluorine content was only about 10.3% of that used in the conventional TFA-MOD method. Attenuated total reflectance-Fourier transformed-infrared spectra(ATR-FT-IR) revealed that BaCO3 was remarkably suppressed in the as-pyrolyzed film and eliminated at 700 • C. Thus YBCO films with a critical current density (Jc) over 5 MA cm −2 (77 K, 0 T, 200 nm thickness) could be obtained on LAO single crystal substrates. In-situ FT-IR spectra showed that no obvious fluorinated gaseous by-products were detected in the pyrolysis step, which indicated that all of the F atoms might remain in the film as fluorides. X-ray diffraction (XRD) θ/2θ scan showed that BaF2, but neither YF3 nor CuF2, was detected in the films quenched at 400 -800 • C. The formation priority of BaF2 over YF3 and CuF2 was interpreted by the chemical equilibrium of the potential reactions. Our study could enlarge the synthesis window of the precursor solution for MOD-YBCO fabrication and open a gate to study the fluorine content in the precursor solution continuously and systematically.