An in-plane SiGe differential capacitive accelerometer for above-IC integration

Wen, Lianggong; Wouters, Kristof; Haspeslagh, L.; Witvrouw, Ann; Puers, Robert

doi:10.1088/0960-1317/21/7/074011

Cited by 9 publications

(3 citation statements)

References 11 publications

(11 reference statements)

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“…The XBMs presented here are made with the poly-SiGe MEMS process developed by IMEC [5][4]. In-plane magnetometers were designed to measure the magnetic field in the plane as depicted in Figure 2 and Figure 3(a).…”

Section: B Design and Modelling Of Sige-based Devicesmentioning

confidence: 99%

Poly-SiGe-based MEMS Xylophone Bar Magnetometer

et al. 2012

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This paper presents the design, fabrication and preliminary characterization of highly sensitive MEMS-based Xylophone Bar Magnetometers (XBMs) realized in imec's polySiGe MEMS technology. Key for our Lorentz force driven capacitively sensed resonant sensor are the combination of reasonably high Q-factor and conductivity of imec's poly-SiGe, our optimized multiphysics sensor design targeting the maximization of the Q-factor in a wide temperature range as well as our proprietary monolithic above-CMOS integration and packaging schemes. Prototypes 3-axis devices were fabricated and characterized. We present optical vibrometer and electrical S-parameter measurements of XBMs performed in vacuum with a reference magnet at increasing sensor separation. The optical oscillation amplitude is well correlated with the magnetic field amplitude. The electrical 2-port measurements, 1 st port as Lorentz force actuator and 2 nd port as capacitive sensor, also reproduces the designed magnetic field dependence. This opens the way towards the on-chip integration of small footprint extremely sensitive magnetometers.

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Section: B Design and Modelling Of Sige-based Devicesmentioning

confidence: 99%

Poly-SiGe-based MEMS Xylophone Bar Magnetometer

et al. 2012

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“…Both in-plane (18) and out-of-plane (19) low-g accelerometers are fabricated in the Gemini project. Figure 11 shows the designed in-plane differential capacitive accelerometer.…”

Section: Concept Gemini Accelerometersmentioning

confidence: 99%

(Invited) SiGe MEMS Technology: A Platform Technology Enabling Different Demonstrators

Witvrouw¹,

Hoof²,

Bryce³

et al. 2010

ECS Trans.

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In imec's 200mm fab a dedicated poly-SiGe above-IC MEMS (Micro Electro-Mechanical Systems) platform has been set up to integrate MEMS and its readout and driving electronics on one chip. In the Flemish project Gemini the possibilities of this platform have been further explored together with the project partners. Three different demonstrators were realized: mirrors for display applications, grating light valves (GLV) and accelerometers. Whereas the mirrors and GLVs are made with a ~300 nm thick SiGe structural layer plus optical coating, the SiGe structural layer thickness for the accelerometers is 4µm in order to improve the capacitive readout of in-plane devices. The processing and measurement results of these functional demonstrators are shown in this paper. These new demonstrators reconfirm the generic nature of the SiGe MEMS platform.

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“…In addition, they can be developed into integrated circuit (IC) packages. 22 There are a variety of ways to measure rotation, which then allows the amount of tilt to be determined. [23][24][25] An inexpensive but effective approach to measure the relative rotation between two linkages is via the use of optical rotary encoders 26 or potentiometers.…”

Section: Introductionmentioning

confidence: 99%

Adapting a Low-Cost Selective Compliant Articulated Robotic Arm for Spillage Avoidance

McMorran

Chung

et al. 2016

SLAS Technology

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Flexible automation systems provide the needed adaptability to serve shorter-term projects and specialty applications in biochemical analysis. A low-cost selective compliant articulated robotic arm designed for liquid spillage avoidance is developed here. In the vertical-plane robotic arm movement test, the signals from an inertial measurement unit (IMU) and accelerometer were able to sense collisions. In the horizontal movement test, however, only the signals from the IMU enabled collision to be detected. Using a calculation method developed, it was possible to chart the regions where the obstacle was likely to be located when a collision occurred. The low cost of the IMU and its easy incorporation into the robotic arm offer the potential to meet the pressures of lowering operating costs, apply laboratory automation in resource-limited venues, and obviate human intervention in response to sudden disease outbreaks.

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An in-plane SiGe differential capacitive accelerometer for above-IC integration

Cited by 9 publications

References 11 publications

Poly-SiGe-based MEMS Xylophone Bar Magnetometer

Poly-SiGe-based MEMS Xylophone Bar Magnetometer

(Invited) SiGe MEMS Technology: A Platform Technology Enabling Different Demonstrators

Adapting a Low-Cost Selective Compliant Articulated Robotic Arm for Spillage Avoidance

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