Many metal alloys are susceptible to corrosion, particularly after processing steps such as welding. Chemical vapor deposition (CVD) is an effective way to modify metal surfaces and impart specific physical and chemical properties. A hydrophobic, nanosegmented silicon oxide coating derived from the discrete cluster molecule H8Si8O12 has been shown to chemisorb to 302 and 304 stainless steel. To understand better how this cluster binds to steel, a comprehensive study of these clusters adsorbed on chromium oxide was undertaken. IR, XPS and valence‐band spectroscopies show convincingly that the clusters are chemisorbed intact on this surface. The coating also readily forms on molybdenum, tungsten, iron and nickel oxides, promising general application to a wide variety of metal alloys. Copyright © 1999 John Wiley & Sons, Ltd.