An integrated field emission array for ion desorption

Resnick, Paul; Holland, C.E.; Schwoebel, P. R.; Hertz, Kristin L.; Chichester, David L.

doi:10.1016/j.mee.2009.11.036

Cited by 7 publications

(5 citation statements)

References 7 publications

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“…1 They are also used in ion sources, for example field ionization sources for neutron generators. [2][3][4][5][6] In all cases, it is important to be able to characterize the field emitter samples, which can be done using electron field emission experiments, see for example Ref. 7.…”

Section: Introductionmentioning

confidence: 99%

Analysis of slope-intercept plots for arrays of electron field emitters

Persaud

2013

Journal of Applied Physics

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In electron field emission experiments, a linear relationship in plots of slope vs. intercept obtained from Fowler-Nordheim analysis is commonly observed for single tips or tip arrays. By simulating samples with many tips, it is shown here that the observed linear relationship results from the distribution of input parameters, assuming a log-normal distribution for the radius of each tip. Typically, a shift from the lower-left to the upper-right of a slope-intercept plot has been correlated with a shift in work function. However, as shown in this paper, the same effect can result from a variation in the number of emitters

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Section: Introductionmentioning

confidence: 99%

Analysis of slope-intercept plots for arrays of electron field emitters

Persaud

2013

Journal of Applied Physics

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“…Details of design, modeling, and fabrication of the basic SNL rounded gate array structures have been previously published. 5,14 Fig . 3(a) is a SEM micrograph of the second type of rounded gate array (400 nm gate liner) that was used in these studies.…”

Section: Snl Array Designmentioning

confidence: 99%

Field ionization characteristics of an ion source array for neutron generators

Johnson

Schwoebel

Resnick

et al. 2013

Journal of Applied Physics

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Low-energy beam transport studies supporting the spallation neutron source 1-MW beam operationa) Rev. Sci. Instrum. 83, 02B727 (2012); 10.1063/1.3681125 Novel methods for improvement of a Penning ion source for neutron generator applicationsa) Rev. Sci. Instrum. 83, 02B309 (2012); 10.1063/1.3670744 Development of ion sources from ionic liquids for microfabrication J.A new deuterium ion source is being developed to improve the performance of existing compact neutron generators. The ion source is a microfabricated array of metal tips with an integrated gate (i.e., grid) and produces deuterium ions by field ionizing (or field desorbing) a supply of deuterium gas. Deuterium field ion currents from arrays at source temperatures of 77 K and 293 K are studied. Ion currents from single etched-wire tips operating under the same conditions are used to help understand array results. I-F characteristics of the arrays were found to follow trends similar to those of the better understood single etched-wire tip results; however, the fields achieved by the arrays are limited by electrical breakdown of the structure. Neutron production by field ionization at 293 K was demonstrated for the first time from microfabricated array structures with integrated gates. V C 2013 AIP Publishing LLC. [http://dx.

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“…3a-h, and are discussed in chronological order. Here, the array geometries are described as they are correlated with the experimental results, whereas details of the fabrication processes have been [20], or will be, published elsewhere. in the gate electrode are centered over the emitter tips.…”

Section: Array Fabrication Evolutionmentioning

confidence: 99%

“…The bulk dielectric, SiO 2 , in the SNL arrays typically ranges from 5 mm to 10 mm in thickness. The tall tip is produced by etching isolated silicon posts that were defined during the fabrication process [20].…”

Section: Sandia National Laboratories (Snl) Fabricationmentioning

confidence: 99%

“…Finally, to reduce field penetration into the silicon tips, a tungsten cladding was applied. Details of design, modeling and fabrication of these rounded gate devices have been previously discussed [20]. The most recent SNL fabrication effort has focused on increasing the thickness of the Si 3 N 4 gate liner.…”

Section: Sandia National Laboratories (Snl) Fabricationmentioning

confidence: 99%

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Field ion source development for neutron generators

Johnson

Schwoebel

Holland

et al. 2012

Nuclear Instruments and Methods in Physics Research Section A:

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An ion source based on the principles of electrostatic field desorption is being developed to improve the performance of existing compact neutron generators. The ion source is an array of gated metal tips derived from field electron emitter array microfabrication technology. A comprehensive summary of development and experimental activities is presented. Many structural modifications to the arrays have been incorporated to achieve higher tip operating fields, while lowering fields at the gate electrode to prevent gate field electron emission which initiates electrical breakdown in the array. The latest focus of fabrication activities has been on rounding the gate electrode edge and surrounding the gate electrode with dielectric material. Array testing results have indicated a steady progression of increased array tip operating fields with each new design tested. The latest arrays have consistently achieved fields beyond those required for the onset of deuterium desorption ($ 20 V/nm), and have demonstrated the desorption of deuterium at fields up to 36 V/nm. The number of ions desorbed from an array has been quantified, and field desorption of metal tip substrate material from array tips has been observed for the first time. Gas-phase field ionization studies with $ 10,000 tip arrays have achieved deuterium ion currents of $ 50 nA. Neutron production by field ionization has yielded $ 10 2 n/s from $ 1 mm 2 of array area using the deuterium-deuterium fusion reaction at 90 kV.

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An integrated field emission array for ion desorption

Cited by 7 publications

References 7 publications

Analysis of slope-intercept plots for arrays of electron field emitters

Analysis of slope-intercept plots for arrays of electron field emitters

Field ionization characteristics of an ion source array for neutron generators

Field ion source development for neutron generators

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