Development and characterization of an iodine field emission ion source for focused ion beam applicationsHigh brightness inductively coupled plasma source for high current focused ion beam applications
Performance of multicusp plasma ion source for focused ion beam applicationsWe report measurements and modeling of an ion source that is based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam systems. Our measurements of total ion current as a function of ionization conditions support an analytical model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2 Â 10 7 A m À2 sr À1 eV À1 and an energy spread less than 0.34 eV. The model is also combined with Monte-Carlo simulations of the inter-ion Coulomb forces to show that the source can be operated at several picoamperes with a brightness above 1 Â 10 7 A m À2 sr À1 eV À1 . We estimate that when combined with a conventional ion focusing column, an ion source with these properties could focus a 1 pA beam into a spot smaller than 1 nm. A total current greater than 5 nA was measured in a lowerbrightness configuration of the ion source, demonstrating the possibility of a high current mode of operation.