An Interface ASIC for MEMS Vibratory Gyroscopes With a Power of 1.6 mW, 92 dB DR and 0.007°/s/&lt;inline-formula&gt; &lt;tex-math notation="LaTeX"&gt;$\sqrt {\rm {Hz}} $ &lt;/tex-math&gt; &lt;/inline-formula&gt; Noise Floor Over a 40 Hz Band

Rombach, S.; Marx, Maximilian; Nessler, Sebastian; Dorigo, Daniel De; Maurer, Michael; Manoli, Yiannos

doi:10.1109/jssc.2016.2571670

Cited by 30 publications

(13 citation statements)

References 23 publications

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“…The noise is shaped around the notch frequency in the pass-band of the filter. A continuous-time (CT) circuit technique is often applied for the design of the interface application-specific integrated circuit (ASIC) to achieve both a low noise floor and low power consumption [8]. Compared with discrete-time (DT) techniques, it avoids noise folding problems and lowers the requirements for the first operational amplifier in the Σ∆ modulators.…”

Section: Introductionmentioning

confidence: 99%

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

Zou

et al. 2020

Sensors

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This paper presents the design and implementation of an auto-tuning continuous-time bandpass sigma-delta (ΣΔ) modulator for micro-electromechchanical systems (MEMS) gyroscope readout systems. Its notch frequency can well match the input signal frequency by adding a signal observation to the traditional ΣΔ modulator. The filter of the observation adopts the same architecture as that of the traditional ΣΔ modulator, allowing the two filters to have the same response to input signal change, which is converted into a control voltage on metal-oxide semiconductor (MOS) resistance in the filters. The automatic tuning not only works to solve the mismatch problem caused by process error and temperature variation, but can also be applied to the interface circuit of gyroscopes with different resonant frequencies. The circuit is implemented in a 0.18-μm complementary metal-oxide semiconductor (CMOS) process with a core area of 2.4 mm2. The improved modulator achieves a dynamic range of 106 dB, a noise floor below 120 dB and a maximum signal-to-noise and distortion ratio (SNDR) of 86.4 dB. The tuning capability of the chip is relatively stable under input signals from 6 to 15 kHz at temperatures ranging from −45 to 60 °C.

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Section: Introductionmentioning

confidence: 99%

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

Zou

et al. 2020

Sensors

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“…Over the last decade, micro-electromechanical system (MEMS) based inertial sensors have found widespread developments in both research efforts and commercial products owing to their preponderance of low cost, small size, low power consumption and suitability for batch fabrication, and are consequently extensively used for detecting angular rates and accelerations in all spatial directions [1,2,3,4]. As consumer devices, these types of sensors are mostly applied for driving assistance and indoor navigation.…”

Section: Introductionmentioning

confidence: 99%

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

Yin

et al. 2019

Micromachines

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This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is employed for automatic amplitude stabilization based on peak detection and proportion-integration (PI) controller. A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and linearity improvement. Capacitance variation induced by mechanical motion is detected by a differential charge amplifier in sense mode. After phase demodulation and low-pass filtering an analog signal indicating the input angular velocity is obtained. Non-idealities are further suppressed by on-chip temperature drift calibration. In order for better compatibility with digital circuitry systems, a low passband incremental zoom sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented for digital output. Manufactured in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, the whole interface occupies an active area of 3.2 mm2. Experimental results show a bias instability of 2.2 °/h and a nonlinearity of 0.016% over the full-scale range.

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“…HV also can be utilized in gyroscope circuits for quadrature compensation and electrostatic force balance, to acquire better accuracy, broader measurement range and larger scale factor [6,7,8,9]. As there has been a trend of miniaturization and integration of the electronic interface along with the development of micro gyroscopes, HV generator is also expected to be built on-chip to mitigate the complexity of the circuit and reduce power consumption [10,11].…”

Section: Introductionmentioning

confidence: 99%

A Regulated Temperature-Insensitive High-Voltage Charge Pump in Standard CMOS Process for Micromachined Gyroscopes

et al. 2019

Sensors

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Micromachined gyroscopes require high voltage (HV) for actuation and detection to improve its precision, but the deviation of the HV caused by temperature fluctuations will degrade the sensor’s performance. In this paper, a high-voltage temperature-insensitive charge pump is proposed. Without adopting BCD (bipolar-CMOS-DMOS) technology, the output voltage can be boosted over the breakdown voltage of n-well/substrate diode using triple-well NMOS (n-type metal-oxide-semiconductor) transistors. By controlling the pumping clock’s amplitude continuously, closed-loop regulation is realized to reduce the output voltage’s sensitivity to temperature changes. Besides, the output level is programmable linearly in a large range by changing the reference voltage. The whole circuit has been fabricated in a 0.18-μm standard CMOS (complementary metal-oxide-semiconductor) process with a total area of 2.53 mm2. Measurements indicate that its output voltage has a linear adjustable range from around 13 V to 16.95 V, and temperature tests show that the maximum variations of the output voltage at −40∼80∘normalC are less than 1.1%.

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An Interface ASIC for MEMS Vibratory Gyroscopes With a Power of 1.6 mW, 92 dB DR and 0.007°/s/<inline-formula> <tex-math notation="LaTeX">$\sqrt {\rm {Hz}} $ </tex-math> </inline-formula> Noise Floor Over a 40 Hz Band

Cited by 30 publications

References 23 publications

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

A Regulated Temperature-Insensitive High-Voltage Charge Pump in Standard CMOS Process for Micromachined Gyroscopes

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