An interface circuit for measuring capacitance changes based upon capacitance-to-duty cycle (CDC) converter

Ignjatović, Željko; Bocko, Mark F.

doi:10.1109/jsen.2004.841453

Cited by 49 publications

(20 citation statements)

References 8 publications

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“…[28][29][30][31][32][33]. We selected the simplest circuit interface based on RO made by low temperature n-channel polysilicon thin film Transistor (PS-nTFT) directly integrated on PI [34][35][36].…”

Section: Sensors Units Designmentioning

confidence: 99%

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

Zampetti

Maiolo

Pecora

et al. 2011

Sensors and Actuators B: Chemical

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Section: Sensors Units Designmentioning

confidence: 99%

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

Zampetti

Maiolo

Pecora

et al. 2011

Sensors and Actuators B: Chemical

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“…[1][2][3][4][5][6][7] Eddy current gap sensors measure the impedance change due to different amounts of eddy current generated between the sensor and the target object due to different displacement between the two. [8][9][10][11][12] Hall effect gap sensors utilize the Hall effect and measure the Hall voltage induced by the sensor and the target material for the position of the target.…”

Section: Introductionmentioning

confidence: 99%

Innovative Differential Hall Effect Gap Sensor through Comparative Study for Precise Magnetic Levitation Transport System

Lee¹,

Park²,

Park³

et al. 2016

Journal of Sensor Science and Technology

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Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of 0.63 mV/µm for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of 3 µm/°C from 20°C to 30°C, and a monotonic characteristic for the gap between the sensor and the target.

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“…The need for complex solutions appears in the context of required added features, e.g., self-calibration, temperature compensation, self-testing, and analog-to-digital conversion. Many different approaches and methods have been introduced for high sensitivity capacitive readout circuits: capacitance-to-voltage converters (CVC) [4]- [9], capacitance-to-frequency converters (CFC) [10], capacitance-to-duty-cycle converters [11], [12] and capacitance-to-phase-shift converters (CPC) [13]. Each of these principles can be implemented through multiple circuit techniques.…”

Section: Introductionmentioning

confidence: 99%

Weakly-Coupled Resonators in Capacitive Readout Circuits

Hafizi-Moori

Cretu

2015

IEEE Trans. Circuits Syst. I

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Low energy consumption and wide operating temperature range of capacitors made them common in sensor designs, e.g., MEMS accelerometers, and hence increased the popularity of capacitive readout circuits. Their main challenges, in either discrete or integrated implementations, are sensitivity, noise, energy consumption, and parasitic components at the analog front end. Compared to conventional "frequency-shift monitoring" which is one of the most accurate and common methods for capacitance measurements, weakly-coupled resonators (well-known in mechanical systems) can offer up to three orders of magnitude increase in sensitivity. Therefore, this concept has been recently applied to the design of micromechanical sensors, e.g., for sensitive mass sensing. This paper applies, for the first time in the electrical domain, the concept of monitoring the eigenstates variations in weakly-coupled resonators as a generic readout circuit technique for measuring very small capacitance changes. The outstanding sensitivity of this method is verified analytically and demonstrated using both extensive circuit simulations and experimental measurements.

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An interface circuit for measuring capacitance changes based upon capacitance-to-duty cycle (CDC) converter

Cited by 49 publications

References 8 publications

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

Innovative Differential Hall Effect Gap Sensor through Comparative Study for Precise Magnetic Levitation Transport System

Weakly-Coupled Resonators in Capacitive Readout Circuits

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