An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography

Constructal law of design and evolution: Physics, biology, technology, and society

“…Spacings for natural and forced convection were reported by Bello-Ochende, Meyer and coworkers, [68][69][70][71] Canhoto and Reis, 72 Gosselin and coworkers, 73,74 Narasimhan and coworkers, 75,76 Zamfirescu and Dincer, 77 as well as by Refs. 78-83. The dendritic heat exchanger proposed in Ref.…”

Global Exponential Stabilization of a Two-Dimensional Pool-Boiling Model

“…Here only measurements at the fluid-heater interface are considered. The output of the system is therefore defined as the average fluid-heater interface temperature (6) The corresponding output-based P-control law is given by (7) The stabilization of the equilibrium is considered. Thereto, new coordinates are defined.…”

“…Boiling heat transfer is the pre-eminent heat transfer mechanism to solve this problem, as it allows for cooling capacities substantially beyond that of conventional methods [2]. Moreover, as boiling heat transfer happens at constant temperatures, irrespective of the heat flux, it can also solve thermal conditioning issues in electric vehicles (EVs) [3], [4] and semiconductor manufacturing [5], [6].…”

A decentralized fuzzy inference method for solving the two-dimensional steady inverse heat conduction problem of estimating boundary condition

“…However, the inverse heat conduction problems (IHCP) can predict these parameters by utilizing measured temperature on or in the structures and have been applied widely [1][2][3][4][5][6].…”