An Investigation of Multi-Porous Silicon Gas Sensor

Abstract

Efficient porous silicon organic vapors sensors werefabricated byemploying a multiporous silicon layer (mPSi) within (Au/mPSi/n-Si/Au) sandwich structures. Based on the morphological nature and the resistivity of resulting (mPSi), the mechanism of current flow in the sensor was analyzed. The SEM images of (mPSi) layer reflect the formation of complex porous and mud-like structures. The mud-like structure consists of connected and non-connected trenches whilethe pore-like structure consists of different pore sizes formed inside this structure. The current response is governed by the silicon channel between the adjacent mud'srather than the silicon nanowires between the adjacent pores. ‫اﻟﻤﺴﺎﻣﺎت‬ ‫اﻟﻤﺘﻌﺪد‬ ‫اﻟﻤﺴﺎﻣﻲ‬ ‫ﻟﻠﺴﻠﯿﻜﻮن‬ ‫اﻟﻐﺎزﯾﺔ‬ ‫اﻟﻤﺘﺤﺴﺴﺎت‬ ‫ﺗﻘﺼﻲ‬‫اﻟﺨﻼﺻﺔ‬ ) ‫اﻟﻤﺴﺎﻣﯿﺔ‬ ‫اﻟﻤﺘﻌﺪد‬ ‫اﻟﺴﻠﯿﻜﻮن‬ ‫طﺒﻘﺎت‬ ‫ﺑﺄﺳﺘﺨﺪام‬ ‫اﻟﻌﻀﻮﯾﺔ‬ ‫ﻟﻼﺑﺨﺮة‬ ‫ﻛﻔﻮء‬ ‫ﻣﺘﺤﺴﺲ‬ ‫ﺗﺤﻀﯿﺮ‬ ‫ﺗﻢ‬ mpsi ‫ﺿﻤﻦ‬ ( ) ‫ﻣﻦ‬ ‫ﺷﺮاﺋﺤﻲ‬ ‫ﺗﺮﻛﯿﺐ‬ Au/mpsi/ n-si/Au ‫ﻋﻠ�ﻰ‬ ‫ﺑﺎﻻﻋﺘﻤ�ﺎد‬ ‫ﺗﺤﻠﯿﻠﮭ�ﺎ‬ ‫ﺗ�ﻢ‬ ‫اﻟﻤﺘﺤﺴ�ﺲ‬ ‫ﺿ�ﻤﻦ‬ ‫اﻟﺘﯿﺎر‬ ‫ﺗﺪﻓﻖ‬ ‫اﻟﯿﺔ‬ .

Gradient-Porosity Porous Silicon (GPSi) as Anti-reflection Coating in Solar Cells Applications

“…Small interface undulations in these regions will extend the effective porosity values at each interface, allowing a greater porosity range to be achieved [8]. This effect can be observed in the SEM image of Figure (3), where high porosity fine structure near the film surface and relatively large undulations at the substrate interface extend the porosity range. The cross-sectional images of the gradient-porosity (GPSi) has attracted a great attention since it describes the variation of pore width and diameter along the pore depth [8], figure (4), shows the cross-sectional images of gradient-porosity (GPSi).…”

“…Various morphologies and porosities of PSi were employed to enhance the light trapping in solar cell. These included by convert the conventional single-layer PSi to gradient-porosity (GPSi) [1,2,3].…”