1991
DOI: 10.1109/16.81626
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An investigation of nonideal base currents in advanced self-aligned 'etched-polysilicon' emitter bipolar transistors

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Cited by 29 publications
(4 citation statements)
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“…This is attributed to the electron tunneling from the valence to the conduction band via processinduced midgap states at the Si/SiO 2 interface and in Si near the Si/SiO 2 interface. 25,26 The application of reverse bias V BE ϭ5.75 V on this device causes both a gradual increase in I B and a spontaneous appearance of RTS fluctuations. Such observations were previously reported.…”
Section: Resultsmentioning
confidence: 99%
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“…This is attributed to the electron tunneling from the valence to the conduction band via processinduced midgap states at the Si/SiO 2 interface and in Si near the Si/SiO 2 interface. 25,26 The application of reverse bias V BE ϭ5.75 V on this device causes both a gradual increase in I B and a spontaneous appearance of RTS fluctuations. Such observations were previously reported.…”
Section: Resultsmentioning
confidence: 99%
“…They were fabricated at the France Telecom Research and Development Center-Grenoble. 25,26 Mean emitter and base doping concentrations are about 10 19 and 10 18 cm Ϫ3 , respectively. The emitter/base and base/collector junctions are located about 500 and 3000 Å below the polysilicon/substrate interface.…”
Section: Methodsmentioning
confidence: 99%
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“…3. The observed base leakage is located at the surface where the link-base doping is high, and can be characterized as trap-assisted tunneling 161, [7]. The lower base leakage in the SiN, samples is related to two properties of LPCVD nitrides: first, a high level of hydrogen is built into the SiN, films during deposition and can be partly released during alloying.…”
Section: Emitter-base Structurementioning
confidence: 99%