Using molecular dynamics simulation, the influence factors of deposition process, such as cluster incident velocity, material hardness and so on, were studied. The cluster incident velocity influences the combination strength between the substrate and cluster greatly. The higher the cluster velocity is, the stronger the combination strength is, and the faster the cluster forms the crystalline structure like the substrate. Higher temperature of the substrate and the cluster will improve the combination strength. The size of the cluster influences the effect of combination as well. The larger the cluster is, the stronger the combination strength is. If a soft cluster impacts on a hard substrate, because of lack of enough deformation at the interface of the substrate, it is difficult to form the effective combination. If a hard cluster impacts on a soft substrate, the lattice defects occur and the cluster takes a longer time to form crystalline structure.