An investigation of the removal of 1-Methyl-2-Pyrrolidinone (NMP)

Dallas, Andrew J.; Ding, Lefei; Joriman, Jon; Hoang, Brian; Seguin, Kevin; Zastera, Dustin

doi:10.1117/12.654839

Cited by 3 publications

(2 citation statements)

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“…To this end, compounds such as NMP, amines, and siloxanes have been openly discussed in the literature through the years and have been addressed previously by the authors and their colleagues. [3][4][5]8,9 However, even though many other organics have been found in key locations within the cleanroom, some at significantly elevated concentrations, they have not been reported as creating any significant issues, until recently.…”

Section: Introductionmentioning

confidence: 97%

“…Over the years, the AMC contaminants of greatest concern in photolithography applications have changed dramatically. Since the early 1990s the focus of AMC filtration has ranged from ammonia (NH3), 1,2 n-methyl-2-pyrrolidinone (NMP), 3,4 amines, 5 sulfur dioxide (SO2) 6 and acid gases in general, 7 to siloxanes (HMDS, HMDSO, and TMS). 8,9 The issues associated with these contaminants have ranged from photoresist issues (e.g.…”

Section: Introductionmentioning

confidence: 99%

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An investigation of perfluoroalkylamine contamination control

Dallas

Zastera

2009

Metrology, Inspection, and Process Control for Microlithography XXIII

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Perfluoroalkylamine (PFAA) contamination has been observed to be a growing contamination issue in semiconductor fabs due to the increased tolerances demanded by next generation lithography processes. These contaminants are found within the cleanroom, process environments and within various tools and enclosures. As a result, effective control of PFAAs in lithographic processing and other critical environments are becoming an important filtration problem. This work was undertaken to evaluate filter performance for the removal of PFAAs and to provide an optimal filtration solution. The filter breakthrough performance of perfluorotributylamine (PFTBA), a common heat transfer fluid, is investigated over a range of environmental conditions for several commercially available adsorbent materials. The results from these accelerated tests indicate that PFAAs can be effectively removed with activated carbon-based chemical filters.

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Section: Introductionmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

An investigation of perfluoroalkylamine contamination control

Dallas

Zastera

2009

Metrology, Inspection, and Process Control for Microlithography XXIII

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Spatiotemporal-resolved nanoparticle synthesis via simple programmed microfluidic processes

Shen

Song

et al. 2014

RSC Adv.

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Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

Lee

Kuo

et al. 2015

Indoor and Built Environment

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Airborne molecular contaminants strongly affect the cleanroom air quality by severely degrading the image quality of semiconductor devices. This study aims to investigate the removal of N-methyl-2pyrrolidone (NMP), an organic alkali compound that commonly appeared in cleanroom environment and used for photoresist stripping in integrated circuit fabrication processes, through adsorption by the citric acid (CA)-modified activated carbon chemical filters. Increase in CA concentration showed positive correlation to the quantity of CA coating but had negative influences on specific surface area. Immersion of carbon particles in solutions containing 3 M CA for 3 h yielded the most chemical modification according to the intensity of carbonyl and hydroxyl functional groups attached onto the carbon surface. NMP adsorption breakthrough studies demonstrated that NMP adsorption by virgin activated carbon was ineffective. Increase in the extent of CA modification resulted in greater adsorption capacity of NMP owing to increased quantity of carbonyl functional groups on its surface. Binary-component adsorption tests involving NMP and toluene vapours revealed that the CA-modified filters had little adsorption capability for toluene as compared to virgin filters. On the other hand, NMP was competitively favourable for adsorption on CA-modified filters, even when these filters were pre-saturated with toluene. The results of this research could be of value to cleanroom or building maintenance operators for technical and environmental improvements in future system design.

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An investigation of the removal of 1-Methyl-2-Pyrrolidinone (NMP)

Cited by 3 publications

References 0 publications

An investigation of perfluoroalkylamine contamination control

An investigation of perfluoroalkylamine contamination control

Spatiotemporal-resolved nanoparticle synthesis via simple programmed microfluidic processes

Citric acid-modified carbon chemical filtration for cleanroom air quality control: Study on N-methyl-2-pyrrolidone and the interference of co-existing toluene

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