“…In power semiconductor devices and modules, such as insulated gate bipolar transistors (IGBTs) and metal-oxide-semiconductor field-effect transistors (MOSFETs), thermal stress arises from the operation and dissipation of heat during switching events and continuous operation [ 7 , 8 , 9 , 10 , 11 , 12 ]. The cyclic nature of these temperature fluctuations subjects thin films within the devices to mechanical strain, leading to fatigue-related phenomena [ 13 ]. Groove formation, a characteristic manifestation of thermal stress, can occur on the surfaces of critical components such as substrates, interconnects, and passivation layers [ 14 , 15 , 16 ].…”