An object pattern post-processor for validation of electron optical modelling

Munro, Eric; Zhu, Xiwen; Liu, H.; Rouse, John A.; Waskiewicz, W. K.

doi:10.1016/s0167-9317(99)00063-5

Microelectronic Engineering

1999

DOI: 10.1016/s0167-9317(99)00063-5

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An object pattern post-processor for validation of electron optical modelling

Eric Munro¹,

Xiwen Zhu²,

H. Liu³

et al.

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An object pattern post-processor for validation of electron optical modelling

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