2022
DOI: 10.3390/nano12081285
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An Operando X-ray Absorption Spectroscopy Study on Sensing Characteristics of Vertically Aligned ZnO Thin Film for Methane Gas Sensors

Abstract: In this work, a simple, facile growth approach for a vertically aligned ZnO thin film is fabricated and its application towards methane gas sensors is demonstrated. ZnO thin film was prepared by a combination of hydrothermal and sputtering methods. First, a ZnO seed layer was prepared on the substrate through a sputtering technique, then a ZnO nanorod was fabricated using a hydrothermal method. The surface morphology of the ZnO film was observed by scanning electron microscopy (SEM). A ZnO nanorod coated on th… Show more

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Cited by 5 publications
(2 citation statements)
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“…In particular, ZnO nanoparticles are commonly used for the industrial manufacturing of microelectronic and optoelectronic devices, including metal oxide semiconductor (MOS) gas sensors, light-emitting diodes, transistors, capacitors, and solar cells [ 9 , 10 , 11 ]. The high surface area and large volume-to-diameter ratios of nanostructured ZnO (nanorods, nanoflowers, nanowires, and nanoparticles) have enticed scientists to expand their applications in various fields [ 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, ZnO nanoparticles are commonly used for the industrial manufacturing of microelectronic and optoelectronic devices, including metal oxide semiconductor (MOS) gas sensors, light-emitting diodes, transistors, capacitors, and solar cells [ 9 , 10 , 11 ]. The high surface area and large volume-to-diameter ratios of nanostructured ZnO (nanorods, nanoflowers, nanowires, and nanoparticles) have enticed scientists to expand their applications in various fields [ 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, the ZnO has a high exciton binding energy value (60 meV), which is a suitable material for many applications such as photodetectors, etc. [3][4][5][6][7][8][9][10]. Some research groups have focused on changing the range of the properties of ZnO to develop areas of utilization by doping different materials, such as aluminum (Al) for transparent conductive oxide [11], magnesium (Mg) for photovoltaic devices [12], and manganese (Mn) for antibacterial thin films [13].…”
Section: Introductionmentioning
confidence: 99%