An optical distance sensor:tilt robust differential confocal measurement with mm range and nm uncertainty

Cacace, L.A.

doi:10.6100/ir653288

2009

DOI: 10.6100/ir653288

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An optical distance sensor:tilt robust differential confocal measurement with mm range and nm uncertainty

L.A. Cacace¹

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Nanometer level freeform surface measurements with the NANOMEFOS non-contact measurement machine

et al. 2009

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Applying aspherical and freeform optics in high-end optical systems can improve system performance while decreasing the system mass, size and number of required components. The NANOMEFOS measurement machine is capable of universal non-contact and fast measurement of aspherical and freeform optics up to ∅500 mm, with an uncertainty of 30 nm (2σ). In this machine, the surface is placed on a continuously rotating air bearing spindle, while a specially developed optical probe is positioned over it by a motion system. A separate metrology system measures the probe and product position relative to a metrology frame.The prototype realization, including custom electronics and software, has been completed. The noise level at standstill is 0.88 nm rms. A reference flat was measured with 13 µm and 0.73 mm tilt. Both measurements show an rms flatness of about 8 nm rms, which correspond to the NMi measurement. A hemisphere has also been measured up to 50° slope, and placed 0.2 mm eccentric on the spindle. These measurements reproduce to about 5 nm rms. Calibration and software are currently being improved and the machine is applied in TNO aspherical and freeform optics production.

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Nanometer level freeform surface measurements with the NANOMEFOS non-contact measurement machine

et al. 2009

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An optical distance sensor:tilt robust differential confocal measurement with mm range and nm uncertainty

Cited by 1 publication

References 0 publications

Nanometer level freeform surface measurements with the NANOMEFOS non-contact measurement machine

Nanometer level freeform surface measurements with the NANOMEFOS non-contact measurement machine

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