International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)
DOI: 10.1109/iedm.2000.904327
|View full text |Cite
|
Sign up to set email alerts
|

An orthogonal 6F/sup 2/ trench-sidewall vertical device cell for 4 Gb/16 Gb DRAM

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2

Citation Types

0
4
0

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(4 citation statements)
references
References 1 publication
0
4
0
Order By: Relevance
“…Applying a self-aligned contact to memory cells is essential to reduce the cell area despite the speed penalty inflicted by the increased contact resistance. Leading developments of standalone DRAM cells in research and development are a 6-4F 2 trenchcapacitor vertical-MOSFET cell [33,34] and a 6F 2 stacked-capacitor open-DL cell [35]. Here, the open-DL cell necessitates a low-impedance array to suppress inherent array noises [4,36] generated by imbalances between a pair of DLs, each of which is placed in different subarrays.…”
Section: One-transistor Cells For Standalone Dramsmentioning
confidence: 99%
“…Applying a self-aligned contact to memory cells is essential to reduce the cell area despite the speed penalty inflicted by the increased contact resistance. Leading developments of standalone DRAM cells in research and development are a 6-4F 2 trenchcapacitor vertical-MOSFET cell [33,34] and a 6F 2 stacked-capacitor open-DL cell [35]. Here, the open-DL cell necessitates a low-impedance array to suppress inherent array noises [4,36] generated by imbalances between a pair of DLs, each of which is placed in different subarrays.…”
Section: One-transistor Cells For Standalone Dramsmentioning
confidence: 99%
“…Static RAM (SRAM) [1][2][3][4][5][6][7][8][9][10] and dynamic RAM (DRAM) [11][12][13][14][15][16][17][18][19][20] (conventional volatile memories) suffer from significant leakage power and flash memory [21][22][23][24][25][26][27][28][29][30] (conventional non-volatile memories (NVMs)) suffers from high write power and poor endurance/ performance. However, emerging NVMs can be beneficial since they offer zero leakage and high scalability, density, and endurance [31].…”
Section: Introductionmentioning
confidence: 99%
“…Present DRAM chips in production integrate a 1-transistor, 1-capacitor (1T/1C) cell having an area of 8 [1]. Experimental 1T/1C cells having an area of 6 or even 4 have been proposed [2], [3], but for all 1T/1C cells, the main challenge in cell area reduction lies with the capacitor integration. Indeed for each memory generation, a constant capacitance value of 30 fF/cell is targeted [4].…”
Section: Introductionmentioning
confidence: 99%