An out-of-plane sensing fluxgate magnetic field sensor with an assisted flux conductor

Hsieh, Ping Hsun; Chen, Shih Jui

doi:10.1063/5.0026964

Cited by 3 publications

(5 citation statements)

References 22 publications

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“…This sensor was checked with excitation frequency 50 kHz and 400 mA current and obtained the 127.3 V T À1 with a linear range 0-80 μT (Figure 27). [117] Schoinas et al presented a flip-chip design, which means fluxgate sensor fabricated on both sides of the wafer. The magnetic Not shown here but present are the insulation layers between the coils and the cores.…”

Section: Advancements In the Pcb Design Systems With Track And Vias S...mentioning

confidence: 99%

“…This sensor was checked with excitation frequency 50 kHz and 400 mA current and obtained the 127.3 V T −1 with a linear range 0–80

μT

( Figure ). [ 117 ]…”

Section: Advancements In Fluxgate Sensormentioning

confidence: 99%

Section: Advancements In Fluxgate Sensormentioning

confidence: 99%

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Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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Research on magnetic sensors has been carried out in recent years to enhance sensing capability, enabling us to understand the Earth's magnetic field changes [1] with better sensitivities of 10 À10 to 10 À2 T. [2] Magnetic field sensors have been extensively investigated according to their operating principles and actions in various applications. Sensitivity and selectivity are the two essential properties crucial in the evolution of magnetic field sensors to achieve high fidelity outputs. The former is strengthened by increasing the sensor area and improvements to the planar surface with various Nano-materials. In contrast, the latter is improved by using multiple materials and techniques to enhance interfacial interactions.Magnetic sensors detect disturbances and changes in magnetic fields such as force, direction, and flux. It is a transducer that converts a magnetic field into an electrical voltage. There are several types of magnetic field sensors, each with its own sensitivity range. In addition to sensitivity, the temperature range, the physical size of the sensor, and its on-chip manufacturability must all be considered. Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT.Magnetic fields of less than 100 pT are extremely weak and far below the earth's magnetic field. Earth magnetic field sensors have a sensitivity range of 10 μT to a few micro-Tesla, while bias magnet field (high field) sensors have a sensitivity of more than 1 mT. The most sensitive low-field sensor is the superconducting quantum interference device (SQUID). It is based on Brian J. Josephson's research on a point-contact connection for measuring extremely low currents.The SQUID ring, the radio-frequency coil, and the big antenna loop are all superconducting components of the SQUID sensor. All three must be cooled to the point where they become superconducting. The SQUID itself is small, but the requirement for liquid helium cooling makes the entire apparatus big and hefty. Magnetoresistive sensors (MR) have a high sensitivity, are inexpensive to manufacture, and are small in size. However, they have poor noise performance and linearity, as well as a small dynamic range, making them unappealing and unsuitable for many low-noise applications. Furthermore, as the power usage is reduced, their sensitivity degrades.Search-coil or induction sensors are high-sensitivity, lowpower sensors, but their sensitivity decreases as the cross-section area decreases, making miniaturization ineffective. Because search coils can detect an alternating current magnetic field, they cannot detect a static magnetic field like the Earth's magnetic field. Magnetic sensors based on semiconductors, such as Hall-Effect sensors, magnetotransistors, and magnetodiodes, are very small in size. Because of its low manufacturing cost

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Section: Advancements In the Pcb Design Systems With Track And Vias S...mentioning

confidence: 99%

“…This sensor was checked with excitation frequency 50 kHz and 400 mA current and obtained the 127.3 V T −1 with a linear range 0–80

μT

( Figure ). [ 117 ]…”

Section: Advancements In Fluxgate Sensormentioning

confidence: 99%

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Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

2022

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“…To measure the magnetic field perpendicular to the sensor, Silva [ 14 ] deposited a layer of magnetoresistive material on a micromachined v-groove surface for z-axis sensing. Hsieh [ 15 ] applied an inverted V-shaped flux conductor on a silicon substrate to assist the out-of-plane sensing. These sensors can be further integrated with in-plane sensors.…”

Section: Introductionmentioning

confidence: 99%

“…An integrated tri-axial sensor can either reduce the complexity of the component placement or working circuit. To increase magnetic flux in a specific direction, flux guide concentrators are introduced into magnetic sensors [ 15 , 16 , 17 , 18 ]. Made of soft ferromagnetic materials with high permeability, these concentrators can effectively conduct the out-of-plane magnetic flux lines to the element plane for z-axis direction sensing.…”

Section: Introductionmentioning

confidence: 99%

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

Chen,

Hong,

Hsieh

et al. 2024

Sensors

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This research proposes a magnetic field sensor with spatial orientation ability. Through the assistance of a magnetic flux concentrator, out-of-plane magnetic flux can be concentrated and guided into the planar magnetic cores of a fluxgate sensor. A printed circuit board is used to construct the basic planar structure, on which the proposed three-dimensional magnetic flux concentrator and magnetic cores are assembled. This reduces the alignment error of the coils and improves the reliability of the sensor. Three-axis sensing is achieved by using the second harmonic signals from selected sensing coil pairs. The magnetometer exhibits a linear range to 130 μT. At an excitation frequency of 50 kHz, the measured sensitivities are 257.1, 468.8, and 258.8 V/T for the X-, Y-, and Z-axis sensing modes, respectively. This sensor utilizes only one sensing mechanism for the vector field, making it suitable for IoT applications, especially for assessing mechanical posture or position.

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A flexible magnetic field sensor based on paramagnetic C60@Fe3O4 nanocomposites and ordered hexagonally structured substrate

Zhang

Song

et al. 2021

Journal of Magnetism and Magnetic Materials

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An out-of-plane sensing fluxgate magnetic field sensor with an assisted flux conductor

Cited by 3 publications

References 22 publications

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

Fabrication Advancements in Integrated Fluxgate Sensors: A Mini Review

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

A flexible magnetic field sensor based on paramagnetic C60@Fe3O4 nanocomposites and ordered hexagonally structured substrate

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