An overview of semiconductor fab automation systems

Chung, Sheng‐Luen; Jeng, MuDer

doi:10.1109/robot.2003.1241731

Cited by 5 publications

(2 citation statements)

References 26 publications

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“…1. For a more detailed description of the semiconductor manufacturing domain and related production control issues we refer to [5].…”

Section: Wafer Factory Layout and Process Flowmentioning

confidence: 99%

“…A complete semiconductor manufacturing can be regarded as a repeated operation of step processing, as shown in Fig.1. For a more detailed description of the semiconductor manufacturing domain and related production control issues we refer to[5].Agent-based Architecture Design. The system architecture of proposed agent-based shop floor control system (ASFCS) for wafer fab, which comprises three control layers and RFID data process module, is shown in Fig.2.…”

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confidence: 99%

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Agent Based Infrastructure with RFID Technology for Autonomous Shop Floor Control System

Shieh

Jeng

Tsai

2011

AMR

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Automatic shop floor control system in distributed computing context is one of the most important links in Computer Integrated Manufacturing (or CIM) system. For most agent-based manufacturing control systems, a real-time product data available mechanism is not considered. In this paper, an integrated approach of RFID technology and multi-agent system of shot-floor control is presented. The proposed framework uses RFID for tracking products in the system and also for attaching product manufacturing information. This shift from off-line planning systems to on-line control systems will facilitate implementations of real-time scheduling requirement in autonomous manufacturing environment.

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“…1. For a more detailed description of the semiconductor manufacturing domain and related production control issues we refer to [5].…”

Section: Wafer Factory Layout and Process Flowmentioning

confidence: 99%

mentioning

confidence: 99%

Agent Based Infrastructure with RFID Technology for Autonomous Shop Floor Control System

Shieh

Jeng

Tsai

2011

AMR

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A Materials Acceleration Platform for Organic Laser Discovery

Aguilar‐Granda

Yazdani

et al. 2022

Advanced Materials

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Conventional materials discovery is a laborious and time‐consuming process that can take decades from initial conception of the material to commercialization. Recent developments in materials acceleration platforms promise to accelerate materials discovery using automation of experiments coupled with machine learning. However, most of the automation efforts in chemistry focus on synthesis and compound identification, with integrated target property characterization receiving less attention. In this work, an automated platform is introduced for the discovery of molecules as gain mediums for organic semiconductor lasers, a problem that has been challenging for conventional approaches. This platform encompasses automated lego‐like synthesis, product identification, and optical characterization that can be executed in a fully integrated end‐to‐end fashion. Using this workflow to screen organic laser candidates, discovered eight potential candidates for organic lasers is discovered. The lasing threshold of four molecules in thin‐film devices and find two molecules with state‐of‐the‐art performance is tested. These promising results show the potential of automated synthesis and screening for accelerated materials development.

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Designing IC Production Lines

Wang

2023

Handbook of Integrated Circuit Industry

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An overview of semiconductor fab automation systems

Cited by 5 publications

References 26 publications

Agent Based Infrastructure with RFID Technology for Autonomous Shop Floor Control System

Agent Based Infrastructure with RFID Technology for Autonomous Shop Floor Control System

A Materials Acceleration Platform for Organic Laser Discovery

Designing IC Production Lines

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