Abstract. Diamond like carbon (DLC) layers have excellent biological properties for use in medicine for coating implants, but poor adhesion to biomedical alloys (titanium alloys, chromium alloys and stainless steel). The adhesion can be improved by doping the DLC layer by chromium, as described in this article. Chromium doped diamond like carbon layers (Cr DLC) were deposited by hybrid deposition system using KrF excimer laser (deposition diamond like carbon -graphite target) and magnetron sputtering (deposition chromium -chromium target). Carbon and chromium contents were determined by wavelength dispersive X-ray spectroscopy. Chromium content of Cr DLC layers was 0, 1, 2, 4-5 and 15 17 at.%. The topology and roughness of layers were studied using atomic force microscopy. Roughness of chromium doped DLC layers was measured on Si substrates about 0.2-0.7 nm and on metallic substrates about 1-6 nm. Mechanical properties were studied by nanoindentation. Hardness and reduced Young s modulus were reduced with rising the Cr content. Hardness and reduced Young s modulus reached from 15.0 GPa to 31.2 GPa and from 172.7 to 271.5 GPa, respectively. Films adhesion was determined by scratch test and reached 19 N for titanium substrates and for highest Cr concentration. Good adhesion to biomedical alloys and high DLC hardness will help to progress in the field of implantology.