An ultrafast temperature response analysis of a MEMS-based igniter using the finite-element method

In this paper, we designed double V-shaped Al/Ni multilayer energy-containing microdevices with different V-angles, and we performed finite element modeling and simulation of the heat transfer process of the designed energy-containing microdevice. Temperature-dependent resistivity was introduced to effectively simulate the phase change during ignition. We simulated the temperature and current density distribution in the central region of the Al/Ni multilayer energy-containing microdevice and predicted the ignition voltage threshold for the specific device structure. Al/Ni multilayer energy-containing microdevices with different V-angles were prepared by electron beam evaporation technology, and ignition experiments on the prepared devices under the excitation of 47 μF capacitance were conducted. The experimental results show that the critical voltage of ignition increases with the increase in the V-angle, which verifies the correctness of the proposed finite element model.

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An ultrafast temperature response analysis of a MEMS-based igniter using the finite-element method

Cited by 4 publications

References 30 publications

Investigation on heat transfer mechanism of semiconductor bridge ignition based on thermoelectric coupling analysis

Investigation on heat transfer mechanism of semiconductor bridge ignition based on thermoelectric coupling analysis

Modeling and simulation of self-propagating exothermic reactions in Al/Ni reactive multilayer films and experimental validation

Modeling and ignition performance study of Al/Ni multilayer energy-containing microdevices

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