2010
DOI: 10.1002/pssc.200983528
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An ultraviolet micro‐LED array and its application for microlens fabrication

Abstract: We report on a direct‐write lithographic technique for the fabrication of micro‐lens arrays with an ultraviolet (UV) micro‐light‐emitting diode (LED) array, serving as an exposure source. Owing to the Lambertian emission distribution of LEDs, the exposed UV sensitive coating (UV epoxy) adopts the same profile, resulting in spherical lenses being formed naturally, without further reflow. This technique is distinctive from conventional UV curing method and possesses many advantages, including simplicity of proce… Show more

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“…As a novel technology applied in the display field, micro-light emitting diodes (micro-LEDs) have attracted lots of attention in recent years. Compared with traditional LEDs, the micro-LED is reduced to micrometer-scale size (< 50 µm) [4][5][6]. For realizing the full color display of micro-LEDs, different technologies have been presented, such as combining the three colorized red, green and blue (RGB) micro-LED chip and color conversion material methods [7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…As a novel technology applied in the display field, micro-light emitting diodes (micro-LEDs) have attracted lots of attention in recent years. Compared with traditional LEDs, the micro-LED is reduced to micrometer-scale size (< 50 µm) [4][5][6]. For realizing the full color display of micro-LEDs, different technologies have been presented, such as combining the three colorized red, green and blue (RGB) micro-LED chip and color conversion material methods [7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%