An Umbrella-Shaped Linear Piezoelectric Actuator Based on Stick-Slip Motion Principle

Yao, Jiafeng; Cai, Junjie; Hu, Yili; Wen, Jianming; Wan, Nen; Wang, Hao; Li, Jianping

doi:10.1109/access.2019.2947449

Cited by 18 publications

(9 citation statements)

References 29 publications

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“…To improve the consistency of FHMs-PSSAs forward and reverse performance, some FHMs-PSSAs adopted the structural design that two asymmetric stators were directly connected in parallel type (Huang et al, 2020; Li et al, 2017a, 2018a; Wang et al, 2019a; Yang et al, 2020b) or in series type (Huang et al, 2012) on the mechanical mechanism; however, due to the normal pressure between the two driving feet and the slider, the other stationary driving foot adversely affected the driving performance as one driving foot was driving. To avoid the above interference phenomenon, although the two driving units were in series (Wang et al, 2019b, 2020b) or parallel (Chu et al, 2016; Liu et al, 2012; Lu et al, 2020a; Wang et al, 2011; Yao et al, 2019; Zhang et al, 2019c) structures, they shared one driving foot by decoupling design, as shown in Figure 10(a) and (b). In addition, the two driving units could be designed into a centrosymmetric mechanism as well (Qin et al, 2019b), the adjusted objects install on the two sliders respectively, and the relative positions between the two objects could be adjusted by the actuator, see Figure 10(c).…”

Section: Improvement Of Fhms-pssasmentioning

confidence: 99%

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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Piezoelectric stick-slip actuators (PSSAs) are famous for ultimate working condition adaptability, simple structure, and positioning accuracy. To meet the demand of industrial application, lots of PSSAs designed with flexure hinge mechanisms (FHMs-PSSAs) have been developed to realize the requirements of translational motion, rotational motion, multi-degree-of-freedom (multi-DOF) motion. The output performance of the FHMs-PSSAs has been greatly improved, including load capacity, speed, and accuracy; moreover, some approaches to solve the problem of the backward motion are provided as well. In this work, the working principle of FHMs-PSSAs is introduced, and the excitation signals applicable to FHMs-PSSAs are summarized. Based on the current research and development status, the progress of structure design of FHMs-PSSAs is introduced in accordance with translatory FHMs-PSSAs, rotary FHMs-PSSAs, and multi-DOF FHMs-PSSAs. Additionally, the developed analysis methods and design schemes to improve the performance are introduced, including theoretical analysis methods, consistency scheme of forward and reverse performance, suppression scheme of the backward motion, and improvement scheme of positioning accuracy. The significance of this work can be regarded as a further supplement to the previous review articles on the PSSAs, which will provide a reference and guidance for the future development of FHMs-PSSAs.

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Section: Improvement Of Fhms-pssasmentioning

confidence: 99%

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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“…A bender-type PEA combines bending PEAs and extending PEAs using the bonding layer that absorbs internal stress, and this bonding layer increases flexibility of bender-type PEAs. Each bender-type PEAs on the top arranged along counterclockwise are named as [1], [2], [3] and [4] respectively. Correspondingly, each PEAs on the bottom are separately labeled as…”

Section: Structure Of Inchworm Piezo Motormentioning

confidence: 99%

“…Piezoelectric actuators (PEAs) are transducers producing a mechanical displacement in response to an applied voltage based on an inverse piezoelectric effect [1,2]. Given their nano-precision displacement, rapid response, and high positioning accuracy [3,4], PEAs are widely used in the fields * Author to whom any correspondence should be addressed. of super-resolution microscopy for semiconductor tests [5], ultra-precision micro-machines for manufacturing [6] and micro-robots for joint compensation technology [7].…”

Section: Introductionmentioning

confidence: 99%

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Han

et al. 2022

Smart Mater. Struct.

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Piezoelectric actuators are widely used in ultra-precision detection platforms where nano-precision and non-magnetic features are required. With the development of the semiconductor industry, actuators develop toward the tendency of smaller size, higher precision, and longer travel. However, these demands are difficult to meet merely by virtue of a single piezoelectric actuator or a simple structured inchworm piezo motor, which makes it necessary to develop a new drive mode following a different drive principle. In this paper, a novel inchworm piezo motor with bender-type PEAs in phalanx distribution was proposed, which facilitates in reducing the dimension of the motor and enhances the performance and stability of the piezo motor. For the purpose of accommodating the bender-type PEAs and providing the preloads to the bender-type PEAs, a flexible mechanism housing was designed and the modal analysis was finished, avoid resonance and reduce structural vibration. Experimental results show that the resolution of the developed motor is 2nm or less under the laser interference with an adoption rate of 10MHz and a resolution of 0.1nm, while the maximum stroke is over 19mm at the constant speed of 2.3mm/s, and the maximum output force is 41.6N.

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“…The high-speed motion performance of the resonant type is superior, but the problems of wear and heat are still to be solved [17,18]. Compared with the inchworm type, the structure of the stick-slip type is relatively simple and easy to control, but its output performance is weak [19,20].…”

Section: Introductionmentioning

confidence: 99%

Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Zhao

et al. 2021

Micromachines

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A novel piezoelectric actuator using a two-stage flexure hinge structure is proposed in this paper, which is used in a compact and high-precision electromechanical field. The two-stage flexure hinge structure is used to provide horizontal thrust and vertical clamping force to the driving feet, which solves the problems of unstable clamping force and insufficient load capacity in traditional stick-slip piezoelectric actuators. Firstly, the main structure of the driver and the working process under the triangular wave excitation voltage are briefly introduced. Secondly, after many simulation tests, the structure of the actuator is optimized and the stability of the structure in providing clamping force is verified. Finally, through the research of the operating performance, when the amplitude is 150 V and the frequency is 3.25 kHz as the excitation source, the maximum speed can reach 338 mm/s and can bear about 3 kg load. It can be seen from the analysis that the two-stage flexure hinge structure can improve the displacement trajectory.

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An Umbrella-Shaped Linear Piezoelectric Actuator Based on Stick-Slip Motion Principle

Cited by 18 publications

References 29 publications

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

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