The
ability to reverse the inherent tendency of noble metals to
grow in an uncontrolled three-dimensional (3D) fashion on weakly interacting
substrates, including two-dimensional (2D) materials and oxides, is
essential for the fabrication of high-quality multifunctional metal
contacts in key enabling devices. In this study, we show that this
can be effectively achieved by deploying nitrogen (N2)
gas with high temporal precision during magnetron sputtering of nanoscale
silver (Ag) islands and layers on silicon dioxide (SiO2) substrates. We employ real-time in situ film growth
monitoring using spectroscopic ellipsometry, along with optical modeling
in the framework of the finite-difference time-domain method, and
establish that localized surface plasmon resonance (LSPR) from nanoscale
Ag islands can be used to gauge the evolution of surface morphology
of discontinuous layers up to a SiO2 substrate area coverage
of ∼70%. Such analysis, in combination with data on the evolution
of room-temperature resistivity of electrically conductive layers,
reveals that presence of N2 in the sputtering gas atmosphere
throughout all film-formation stages: (i) promotes 2D growth and smooth
film surfaces and (ii) leads to an increase of the continuous-layer
electrical resistivity by ∼30% compared to Ag films grown in
a pure argon (Ar) ambient atmosphere. Detailed ex situ nanoscale structural analyses suggest that N2 favors
2D morphology by suppressing island coalescence rates during initial
growth stages, while it causes interruption of local epitaxial growth
on Ag crystals. Using these insights, we deposit Ag layers by deploying
N2 selectively, either during the early precoalescence
growth stages or after coalescence completion. We show that early
N2 deployment leads to 2D morphology without affecting
the Ag-layer resistivity, while postcoalescence introduction of N2 in the gas atmosphere further promotes formation of three-dimensional
(3D) nanostructures and roughness at the film growth front. In a broader
context this study generates knowledge that is relevant for the development
of (i) single-step growth manipulation strategies based on selective
deployment of surfactant species and (ii) real-time methodologies
for tracking film and nanostructure morphological evolution using
LSPR.