Analogue vibration cancellation by means of piezoelectric elements

Abstract

An active vibration control system has been developed based upon analogue feedback and optical vibration sensing. Composite piezoelectric films have been deposited directly onto the cantilever to provide a means of actuation and micro-positioning. The system operates such that unwanted vibrations in the cantilever are removed and yet it remains possible to deflect the cantilever statically or dynamically aa required. Results are presented for such a system.