This paper gives an outline of the present state of the quantitative energy dispersive x-ray micro-analysis according to the Cliff-Lorimer method in combination with the STEM. Spectrometer efficiency, line intensity fraction, fluorescence yield, ionization cross section and the critical specimen thickness are discussed in particular detail. The main emphasis in this context is placed on the transferability of data given in the literature to other equipment, and on the accuracy of equations for the calculation of the above mentioned parameters.
Correction FactorsWhen an electron beam strikes matter, in addition to Bremsstrahlung, characteristic x-radiation is generated. According to equation (1) and contrary to the situation for bulk specimens, not only electron backscattering, but also absorption and fluorescence processes may be neglected for thin specimens (Philibert and Tixier 1975). The intensity I, of the x-ray line of an element A, measured using an energy dispersive detector, is described (e. g. Tixier 1975 and Junossy et al. 1979) by: